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AssigneeTaiyo Toyo Sanso Co., Ltd.
InventorsTaizo Ichida, Shinichi Ando, Akihide Terao
Estimating the term…
Real-time and accurate detection of the concentration of hydrogen peroxide vapor supplied into a treatment vessel is made possible by a method and apparatus that permits efficient and effective sterilization, disinfection, or the like with hydrogen peroxide vapor. The concentration of hydrogen peroxide vapor in a treatment vessel is detected by a semiconductor gas sensor in a treatment system where an object to be treated is brought into contact with hydrogen peroxide vapor in a treatment vessel with the pressure fixed at a constant level. The output of the semiconductor gas sensor is revised by an arithmetic unit in relation to the temperature and/or the humidity in the treatment vessel detected on the basis of data, worked out in advance, representing the correlation between the output of the semiconductor gas sensor and the concentration of hydrogen peroxide vapor in which the temperature and/or the humidity are parameters, and the value thus revised is indicated on a concentration indicator as concentration of hydrogen peroxide.
A method for deterining by a semiconductor gas sensor the concentration of hydrogen peroxide vapor in a treatment system in which an object to be treated is brought into contact with hydrogen peroxide vapor in a treatment vessel with the pressure kept constant and one of the temperature or the humidity maintained at a constant level, comprising the steps of:
A method for determining by a semiconductor gas sensor the concentration of hydrogen peroxide vapor in a treatment system in which an object to be treated is brought into contact with hydrogen peroxide vapor in a treatment vessel with the pressure maintained at a constant level, comprising the steps of:
An apparatus for determining the concentration of hydrogen peroxide vapor in a treatment system in which an object to be treated is brought into contact with hydrogen peroxide vapor in a treatment vessel with the pressure kept constant and one of the temperature or the humidity maintained at a constant level, comprising:
An apparatus for determining the concentration of hydrogen peroxide vapor in a treatment system in which an object to be treated is brought into contact with hydrogen peroxide vapor in a treatment vessel with the pressure maintained at a constant level, comprising:
Dependencies are inferred from the claim text.