Aerodynamic electrode support bar
AssigneeCymer, Inc.
InventorR. Kyle Webb
Life of this patent
Estimating the term…
Abstract
A support bar member for supporting an electrode member of a pulsed laser system is described. The support bar member includes an aerodynamic nose configured to reduce an aerodynamic load applied against a blower assembly of the laser system by the support bar member. The nose provides an aerodynamic cut-off region on the support bar member such that, when the blower assembly is operating, the blower assembly does not vibrate significantly.
Claims18
A laser apparatus, comprising:
- a) a laser chamber having interconnected walls defining a laser cavity inside said laser chamber, said laser cavity housing gases;
- b) a blower assembly disposed in said laser cavity for circulating said gases;
- c) a pair of electrode members disposed in said laser cavity;
- and
- d) a support bar member configured to support one of said electrode members, said support bar member having a cut-off region configured to reduce vibration of said blower assembly.
A support bar member for supporting an electrode member of a laser apparatus, comprising:
- a) a first side configured to support said electrode member of said laser apparatus;
- b) a second side opposing said first side;
- and
- c) an aerodynamic nose extending from said first and second sides.
A method for circulating gases in a laser chamber, said laser chamber including a blower assembly and a pair of electrode members, comprising:
- a) providing a support bar member configured to support one of said electrode members, said support bar member comprising an aerodynamic nose;
- and
- b) driving said blower assembly to circulate gases in said laser chamber, said gases flowing across said aerodynamic nose, whereby said support bar member does not significantly vibrate said blower assembly.
Dependencies are inferred from the claim text.