Method and apparatus for fabricating semiconductor devices
AssigneeCanon Kabushiki Kaisha
InventorsYasuyoshi Yamatsu, Fumiaki Kitayama
Life of this patent
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Abstract
An apparatus for fabricating a device includes a stage for holding a substrate to be treated, a hand for carrying the substrate to the stage, and a mark detecting system for detecting a mark formed on the substrate, before the substrate is transferred to the stage, in order to roughly position the substrate. The hand is provided with a reference mark which can be detected by the mark detecting system, and the mark detecting system detects a mark of the substrate and the reference mark of the hand. Also, the hand can carry the substrate to the stage after rotating the stage in a rotational direction in response to a value detected by the mark detecting system.
Claims13
An apparatus for fabricating a semiconductor, said apparatus comprising:
- a stage for holding a substrate to which treatment is performed, the substrate having a mark formed thereon;
- a hand for carrying the substrate to said stage, said hand having a reference mark formed thereon;
- and
- a mark detecting system for detecting the mark formed on the substrate, before the substrate is transferred to said stage, and for detecting the reference mark of said hand;
- and
- means responsive to the detected mark on the substrate and the detected reference mark of the hand for roughly positioning the substrate.
An apparatus for fabricating a semiconductor, said apparatus comprising:
- a stage for holding a substrate to which treatment is performed, the substrate having marks formed thereon;
- a hand for carrying the substrate to said stage;
- and
- a mark detecting system for detecting the marks formed on the substrate, before the substrate is transferred to said stage, in order to roughly position the substrate,
- wherein said hand carries the substrate onto said stage after rotating said stage in a rotational direction in response to the detection by said mark detecting system.
Dependencies are inferred from the claim text.