Wedge and transverse magnet arrays

A two-dimensional motor comprising:

• a stationary stage;
• and
• a moving stage;
• wherein the stationary stage or the moving stage comprises a magnet array having a plurality of magnets disposed generally in a reference plane and the other stage comprises a magnetic coil array, wherein each of the magnets has a magnetic polarization at an angle to said reference plane, the magnets arranged in groups, each group creating a resultant magnetic polarization substantially perpendicular to the reference plane, and the magnets in each group are arranged such that the resultant magnetic polarization of each group alternates in a periodic manner along two orthogonal directions across the reference plane.

An exposure apparatus, comprising:

• an optical system that images a pattern onto an article;
• a stage device that positions the article in reference to the optical system, said stage device comprising:
• a two-dimensional motor which comprises a stationary stage and a moving stage, wherein the stationary stage or the moving stage comprises a magnet array having a plurality of magnets disposed generally in a reference plane and the other stage comprises a magnetic coil array, wherein each of the magnets has a magnetic polarization at an angle to the reference planes, the magnets arranged in groups, each group creating a resultant magnetic polarization substantially perpendicular to the reference plane, and the magnets in each group are arranged such that the resultant magnetic polarization of each group alternates in a periodic manner along two orthogonal directions across the reference plane;
• and
• a support member connected to the moving stage, the support member supporting the article for movement in a plane of the two-dimensional motor.

An exposure apparatus, comprising:

• an optical system that images a pattern onto an article;
• an article stage device that supports the article in reference to the optical system;
• a pattern stage device that positions the pattern in reference to the optical system;
• said pattern stage device comprising:
• a two-dimensional motor which comprises a stationary stage and a moving stage, wherein the stationary stage or the moving stage comprises a magnet array having a plurality of magnets disposed generally in a reference plane and the other stage comprises a magnetic coil array, wherein each of the magnets has a magnetic polarization at an angle to the reference planes, the magnets arranged in groups, each group creating a resultant magnetic polarization substantially perpendicular to the reference plane, and the magnets in each group are arranged such that the resultant magnetic polarization of each group alternates in a periodic manner along two orthogonal directions across the reference plane;
• and
• a support member connected to said moving stage, the support member supporting the pattern for movement in a plane of the two-dimensional motor.

A magnet array comprising:

• a plurality of magnets disposed generally in a reference plane, wherein each of the magnets has a magnetic polarization at an angle to the reference plane, and the magnets are arranged in groups, each group creating a resultant magnetic polarization substantially perpendicular to the reference plane;
• a plurality of transverse magnets, wherein at least one transverse magnet is disposed between adjacent groups of magnets of opposite polarity such that the magnetic polarity of the transverse magnets is substantially parallel to the reference plane and adjacent magnets in adjacent groups form a continuous magnetic flux path therethrough;
• and
• a plurality of focusing magnets, wherein the focusing magnets are disposed on the groups of magnets at the reference plane for focusing the magnetic flux substantially perpendicular to the reference plane.