Semiconductor element having vertical discrete bipolar transistor and semiconductor device having same
AssigneeKabushiki Kaisha Toshiba
InventorTatsuhiko Tsukamoto
Life of this patent
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Abstract
An emitter conducting portion, which comprises a p+-type silicon substrate 10, p+-type emitter buried region 14 and a p+-type emitter leading region 20, is formed in a semiconductor element. The p+-type silicon substrate 10 of the semiconductor element is die-bonded to an emitter lead ER for electrically connecting an emitter electrode E to the emitter lead ER by means of the emitter conducting portion. Thus, it is possible to dispense with an emitter bonding wire for connecting the emitter electrode E to the emitter lead ER, and it is possible to remove impedance caused by the emitter bonding wire, so that it is possible to improve the high-frequency characteristics of a semiconductor device.
Claims20
A semiconductor element having a vertical discrete bipolar transistor formed in a first semiconductor layer formed on a second semiconductor layer formed on a semiconductor substrate, comprising:
- a base region formed in a part of said first semiconductor layer to be exposed;
- an emitter region formed in a part of said base region to be exposed at a surface of said first semiconductor layer;
- a collector region provided in said first semiconductor layer to border on said base region, at least a part of said collector region being exposed at a surface of said first semiconductor layer;
- a base electrode formed on an exposed surface of said base region and being electrically connected to said base region;
- a collector electrode formed on an exposed surface of said collector region and being electrically connected to said collector region;
- an emitter electrode formed on an exposed surface of said emitter region and being electrically connected to said emitter region, said emitter electrode having a wiring layer;
- an emitter conducting portion formed of a part of said first and second semiconductor layers and substantially the whole semiconductor substrate, for electrically connecting said emitter electrode to said semiconductor substrate, said emitter conducting portion being electrically isolated from said base region and said collector region and an area of said emitter conducting portion being greater than that of said collector region in a top plan view;
- and
- an enlarged emitter electrode formed with a same layer as said wiring layer of said emitter electrode, said enlarged emitter electrode directly connecting said wiring layer of said emitter electrode to said emitter conducting portion.
A semiconductor element comprising:
- a p-type semiconductor substrate;
- a p-type first semiconductor layer formed on said p-type semiconductor substrate
- an n-type second semiconductor layer formed on said first semiconductor layer, a part of said n-type second semiconductor layer serving as a collector region;
- an emitter electrode formed on said second semiconductor layer, said emitter electrode having a wiring layer;
- a collector electrode formed on said second semiconductor layer;
- a base electrode formed on said second semiconductor layer;
- a high-impurity-concentration n-type collector buried region, formed between said first semiconductor layer and said second semiconductor layer, for electrically leading said collector region;
- a high-impurity-concentration n-type collector leading region, formed in said second semiconductor layer, for connecting said collector electrode to said collector buried region;
- a p-type base region formed in a surface portion of said second semiconductor layer to be connected to said base electrode;
- an n-type emitter region formed in a surface portion of said base region to be connected to said emitter electrode;
- a p-type emitter conducting portion formed of a part of said first and second semiconductor layers and substantially the whole semiconductor substrate, for electrically connecting said emitter electrode to said semiconductor substrate, said emitter conducting portion being electrically isolated from said base region and said collector region and having a greater planar area than that of said collector region;
- and
- an enlarged emitter electrode formed with the same layer as said wiring layer of said emitter electrode, said enlarged emitter electrode directly connecting said wiring layer of said emitter electrode to said emitter conducting portion.
A semiconductor device comprising:
- a base lead;
- a collector lead;
- an emitter lead;
- and
- a semiconductor element formed on said emitter lead and having a vertical discrete bipolar transistor formed in a first semiconductor layer formed on a second semiconductor layer formed on a semiconductor substrate, comprising:
- a base region formed in a part of said first semiconductor layer to be exposed;
- an emitter region formed in a part of said base region to be exposed at a surface of said first semiconductor layer;
- a collector region provided in said first semiconductor layer to border on said base region, at least a part of said collector region being exposed at a surface of said first semiconductor layer;
- a base electrode formed on an exposed surface of said base region and being electrically connected to said base region;
- a collector electrode formed on an exposed surface of said collector region and being electrically connected to said collector region;
- an emitter electrode formed on an exposed surface of said emitter region and being electrically connected to said emitter region, said emitter electrode having a wiring layer;
- an emitter conducting portion formed of a part of said first and second semiconductor layers and substantially the whole semiconductor substrate, for electrically connecting said emitter electrode to said semiconductor substrate, said emitter conducting portion being electrically isolated from said base region and an area of said emitter conducting portion being greater than that of said collector region in a top plan view;
- and
- an enlarged emitter electrode formed with the same layer as said wiring layer of said emitter electrode, said enlarged emitter electrode directly connecting said wiring layer of said emitter electrode to said emitter conducting portion.
Dependencies are inferred from the claim text.