Structure of a polysilicon plug
AssigneeUnited Microelectronics Corp.
InventorKun-Chi Lin
Life of this patent
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Abstract
A structure of a polysilicon via that includes a semiconductor substrate, a conducting layer on the substrate, a dielectric layer on the conducting layer, a polysilicon plug formed in the dielectric layer, a polysilicon layer on the polysilicon plug, and a silicide layer formed on the polysilicon layer. The polysilicon layer is electrically connected to the conducting layer through the polysilicon plug. The structure of a polysilicon via according to the invention prevents the occurrence of leakage currents in the presence of misalignment in the follow-up photolithography process.
Claims9
A structure of a polysilicon via, the method comprising:
- a semiconductor substrate, wherein the semiconductor substrate further comprises a conducting layer thereon;
- a single-layered dielectric layer on the conducting layer;
- a polysilicon plug with a first width formed in the single-layered dielectric layer so that the polysilicon plug and the single-layered dielectric layer subsequently have the same thickness, wherein the polysilicon plug is electrically connected to the conducting layer;
- a polysilicon layer with a second width on the polysilicon plug, wherein the second width is the same as the first width and the polysilicon layer is electrically connected to the polysilicon plug;
- and
- a silicide layer formed with a third width on the polysilicon layer, wherein the third width is the same as the first width and the thickness of the silicide layer is larger than the thickness of the polysilicon layer.
A structure of a polysilicon via, the method comprising:
- a semiconductor substrate, wherein the semiconductor substrate further comprises a conducting layer thereon;
- a single-layered dielectric layer on the conducting layer;
- a polysilicon plug formed in the single-layered dielectric layer so that the polysilicon plug and the single-layered dielectric layer subsequently have the same thickness, wherein the polysilicon plug is electrically connected to the conducting layer;
- a polysilicon layer on the polysilicon plug, wherein the polysilicon layer has a sufficiently small width to just be located only on the polysilicon plug;
- and
- a silicide layer formed on the polysilicon layer, wherein the thickness of the silicide layer is larger than the thickness of the polysilicon layer.
Dependencies are inferred from the claim text.