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US 6,188,100 B1Granted
Concentric container fin capacitor
AssigneeMicron Technology, Inc.
InventorMichael Hermes
Life of this patent
Estimating the term…
Abstract
A container capacitor and method having an internal concentric fin. In one embodiment, the finned capacitor is a stacked container capacitor in a dynamic random access memory circuit. The finned container capacitor provides a high storage capacitance without increasing the size of the cell. The capacitor fabrication requires only two depositions, a spacer etch and a wet etch step in addition to conventional container capacitor fabrication steps.
Claims32
A finned capacitor formed within a container having a sidewall and bottom, comprising:
- a first material layer within the container and covering at least a portion of the container sidewall;
- a second material layer in the form of a cylinder concentric with said container sidewall, said second material layer being in contact with said first material layer and said first material layer being disposed between the sidewall and second material layer;
- a first layer of conductive material on both sides of the concentric cylinder and on at least a portion of the container sidewall;
- and
- a layer of dielectric material on the layer of first conductive material.
2 more elements
A capacitor comprising:
- a container having a sidewall and bottom;
- a first annular ring layer within said container and covering a portion of the container sidewall, and having a height extending in a direction parallel to said sidewall;
- a second cylindrical layer concentric with said first annular ring layer and extending in a direction parallel to the container sidewall a distance greater than the height of the first annular ring;
- a first layer of conductive material on at least portions of both sides of said second cylindrical layer, at least a portion of said first annular ring, and at least portions of said container sidewall and bottom;
- a layer of dielectric material on said layer of first conductive material, including said first conductive material on both sides of the second cylindrical layer;
- and
- a second conductive layer, said dielectric layer being disposed between said first conductive layer and said second conductive layer.
4 more elements
A computer system comprising:
- a processor;
- and
- a memory circuit connected to the processor, wherein one or more of said processor or memory circuits contain at least one container capacitor, said capacitor having
- a container sidewall and bottom;
- a first annular ring layer covering a portion of the container sidewall and having a height extending in a direction parallel to said sidewall;
- a second annular ring layer on said first annular ring layer and extending in a direction parallel to the container sidewall a distance greater than the height of the first annular ring so that a space is formed between the second annular ring and the container sidewall;
- a first layer of conductive material on at least portions of both sides of said second annular ring, at least a portion of said first annular ring and at least portions of said container sidewall and bottom;
- a layer of dielectric material on said layer of first conductive material including said first conductive material between the second annular ring and the container sidewall;
- and
- a second layer of conductive material on said dielectric layer.
7 more elements
A memory cell comprising:
- a transistor;
- and
- a capacitor, said transistor and capacitor being connected in a memory array, said capacitor including
- a container having a sidewall and bottom;
- a first annular ring layer covering a portion of the container sidewall and having a height extending in a direction parallel to said sidewall;
- a second cylindrical layer concentric with said first annular ring layer and extending in a direction parallel to the sidewall a distance greater than the height of the first annular ring so that a space is formed between the second cylindrical layer and the container sidewall;
- a first layer of conductive material on at least portions of both sides of said second cylindrical layer, a portion of said first annular ring and at least portions of said container sidewall and bottom;
- a layer of dielectric material on said layer of first conductive material;
- and
- a second layer of conductive material on said dielectric layer.
7 more elements
Dependencies are inferred from the claim text.