Solid imaging device having an antifuse element and method of making the same

Abstract

A solid imaging device including a substrate voltage generating device possessing high display quality, high reliability, and method of manufacturing. The solid imaging device includes a plurality of photoelectric conversion elements, a vertical charge transfer portion for transferring the signal charges generated by the photoelectric conversion element, and a substrate voltage generating circuit. The substrate generating circuit 10 includes a variable resistor 11 formed by arranging a plurality of sets formed by selection switches 13 and resistors 14a-14e, and a load resistor 12 disposed by connecting with the variable resistor 11 between the source potential Vdd and the earth potential, and the substrate voltage Vsub is obtained from a contact between the variable resistor 11 and the load resistor 12. The selection switches 13 are consituted by antifuse elements.

Dependencies are inferred from the claim text.