Thin film transistor and a method of manufacturing thereof
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsSatoshi Shimizu, Shuichi Ueno, Shigenobu Maeda, Takashi Ipposhi
Life of this patent
Estimating the term…
Abstract
According to a method of manufacturing a thin film transistor (TFT), amorphous silicon is formed by ion-implanting either silicon or nitrogen into a region of polysilicon while a region located at the sidewall of a gate electrode is selectively left using the stepped portion of the gate electrode. Then, a heat treatment is applied to convert the amorphous silicon into polysilicon with the remaining polysilicon as a seed crystal. As a result, polysilicon having crystal grains of great grain size can be formed in uniform. Thus, the electric characteristics of a TFT can be improved with no difference in the electric characteristics between each TFT.
Claims3
A thin film transistor comprising:
- a gate electrode,
- a polysilicon film including a drain region, a source region and a channel region,
- a gate insulating film interposed between said gate electrode and said polysilicon film,
- wherein said thin film transistor is formed on a insulation film, and
- wherein nitrogen is segregated in the vicinity of at least one of the interfaces between said drain region and said gate insulating film, between said channel region and said gate insulating film and between said source region and said gate insulating film.
Dependencies are inferred from the claim text.