Apparatus for extracting TEM specimens of semiconductor devices

An apparatus for extracting a specimen of transmission electron microscope (TEM) comprising:

• a base;
• a first shifting assemblage, located on said base, including a first plate, a first movable stage, and a first micrometer, wherein said first plate is fixed on said base, said first movable stage located on said first plate comprises a first protuberance, and said first micrometer is locked on side wall of said first plate;
• a second shifting assemblage, located on said first shifting assemblage, including a second plate, a second movable stage, and a second micrometer, wherein said second plate is fixed on said first movable stage, said second movable stage located on said second plate comprises a second protuberance, and said second micrometer is locked on side wall of said second plate;
• a L-shape support, fixed on said second shifting assemblage;
• third shifting assemblage, located on the side wall of said L-shape support, including a third plate, a third movable stage, and a third micrometer, wherein said third plate is fixed on the side wall of said L-shape support, said third movable stage located on said third plate comprises a third protuberance, and said third micrometer is locked on side wall of said third plate;
• and
• an extracting assemblage, located on said third shifting assemblage, including a stand hold fixed on said third movable stage, a stand locked in said stand hold, an arm locked in a hole through said stand, a fastener locked in a sloping hole through the arm, and a pipette fastened by said fastener.