Photonic radiation sensor of large dimensions
AssigneeCommissariat a l'Energie Atomique
InventorsGérard Destefanis, Michel Wolny
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Abstract
A two-dimensional photonic radiation detector based on a technique of hybridizing a detection chip onto a read chip through a micro-balls network making the electrical and mechanical inter-connection between two chips, the detection chip being composed of a two-dimensional structure of ixj pixels, an active layer (41) being epitaxed onto a substrate (40), each elementary photosensitive component consisting of an N/P or P/N diode formed in the active layer (41), the contact point on the N or P area being made at each pixel, the contact point on the other P or N area being common to all diodes, in which the detector includes a wide gap optically and electrically transparent intermediate layer (42) located between the active layer (41) and the substrate (40).
Claims9
Two-dimensional photonic radiation detector based on a technique of hybridizing a detection chip onto a read chip through a micro-balls network making the electrical and mechanical inter-connection between two chips, the detection chip being composed of a two-dimensional structure of ixj pixels, an active layer being epitaxed onto a substrate, each elementary photosensitive component consisting of an N/P or P/N diode formed in the active layer, the contact point on the N or P area being made at each pixel, the contact point on the other P or N area being common to all diodes, comprising a wide gap optically and electrically transparent intermediate layer located between the active layer and the substrate.
Dependencies are inferred from the claim text.