Process for making heater member
AssigneeBridgestone Corporation
InventorsYoshitomo Takahashi, Hiroaki Wada, Akira Satou
Life of this patent
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Abstract
A heater member is formed of a silicon carbide sintered body. The silicon carbide sintered body includes silicon carbide powder and a non-metal-based sintering auxiliary, and is obtained by sintering a homogeneous mixture of the silicon carbide powder and the non-metal-based sintering auxiliary. The silicon carbide sintered body is formed to have a density of 2.9 g/cm3 or higher. Further, the silicon carbide sintered body is preferably obtained by hot pressing, and also preferably has physical properties of a volume resistivity of 10 Ωcm or less and a total content of impurity elements of 1 ppm or less.
Claims26
A process for making a heater member comprising a silicon carbide sintered body, the process comprising:
- providing a silicon carbide powder consisting essentially of silicon carbide particles that have an average particle diameter of 0.01 to 5 μm;
- forming a mixture consisting essentially of the silicon carbide powder and a non-metal-based sintering additive, the non-metal-based sintering additive consists essentially of a non-metal based sintering auxiliary that produces carbon upon heating and that covers the surface of silicon carbide powder;
- sintering the mixture in a non-oxidizing atmosphere to obtain a silicon carbide sintered body having a density of at least 2.9 g/cm3;
- and
- forming a heater member from the silicon carbide sintered body.
A process for making a heater member comprising a silicon carbide sintered body, the process comprising:
- providing a silicon carbide powder consisting essentially of silicon carbide particles;
- forming a mixture consisting essentially of the silicon carbide powder and a non-metal-based sintering additive, the non-metal-based sintering additive consists essentially of a non-metal based sintering auxiliary that produces carbon upon heating and that covers the surface of silicon carbide powder;
- sintering the mixture in a non-oxidizing atmosphere to obtain a silicon carbide sintered body having a density of at least 2.9 g/cm3 and a total impurity content of 5 ppm or less;
- and
- forming a heater member from the silicon carbide sintered body.
A process for making a heater member comprising a silicon carbide sintered body, the process comprising:
- providing a silicon carbide powder consisting essentially of silicon carbide particles;
- forming a mixture consisting essentially of the silicon carbide powder and a non-metal-based sintering additive, the non-metal-based sintering additive consists essentially of a non-metal based sintering auxiliary that produces carbon upon heating and that covers the surface of silicon carbide powder;
- sintering the mixture in a non-oxidizing atmosphere to obtain a silicon carbide sintered body having (i) a density of at least 2.9 g/cm3, (ii) a total impurity content of 5 ppm or less and (iii) a volume resistivity of 10 Ωcm or less;
- and
- forming a heater member from the silicon carbide sintered body.
Dependencies are inferred from the claim text.