Method of forming metal layer(s) and/or antireflective coating layer(s) on an integrated circuit
AssigneeCypress Semiconductor Corporation
InventorsEnde Shan, Gorley Lau, Sam G. Geha
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Abstract
A method of forming metallic layers on a substrate includes the steps of forming a first layer including a first metal on the substrate; cooling the first layer for a period of time sufficient to suppress formation of an intermetallic phase; and forming a second layer including a second metal distinct from the first metal on the first layer. The cooling step decreases the roughness of the resultant stacked structure by suppressing the formation of an intermetallic phase layer between the two metallic layers and by suppressing “bumps” or other surface irregularities that may form at relatively reactive grain boundaries in the first layer.
Claims19
A method of forming metallic layers on a substrate, comprising the steps of:
- forming a first layer comprising a first metal on the substrate;
- cooling the first layer for a period of time sufficient to suppress formation of an intermetallic phase;
- and
- forming a second layer comprising a second metal distinct from said first metal on the first layer.
Method of reducing a surface roughness of a stacked structure including at least a first and a second metal layer, comprising the steps of:
- depositing the first metal layer at a first temperature;
- cooling the first metal layer to a second temperature that is less than the first temperature, the second temperature being effective to suppress formation of an intermediate layer between the first and second metal layers that includes at least one element from the first metal layer and at least one element from the second metal layer;
- and
- depositing the second metal layer.
A stacked structure including at least a metallization layer and an overlying anti-reflective coating, produced by carrying out the steps of:
- depositing the metallization layer on a substrate;
- cooling the metallization layer for at least 30 seconds;
- and
- depositing the anti-reflective coating on the cooled metallization layer.
Dependencies are inferred from the claim text.