Method and apparatus for making mosfet's with elevated source/drain extensions

A method of producing a semiconductor device on a surface of a substrate, comprising the steps of:

• forming a gate oxide on the surface of the substrate, where the gate oxide has a first side adjacent to the surface of the substrate and a second side opposite from the first side;
• forming a gate on the gate oxide, wherein the gate has a first side adjacent to the second side of the gate oxide and a second side opposite from the first side at a top of the gate;
• forming an anti-reflective coat on the gate;
• forming first dielectric spacers on the sides of the gate, where the first dielectric spacers have a first side which is adjacent to the gate, a second side opposite to the first side and a width between 150-200 Å;
• forming a first semiconductor layer on the surface of the substrate, where the first semiconductor layer extends to the first dielectric spacer, and wherein the first dielectric spacer is between the first semiconductor layer and the gate, and wherein the first semiconductor layer has a first side adjacent to the surface of the substrate and a second side opposite from the first side;
• implanting a dopant into the first semiconductor layer;
• forming a second dielectric spacer on the second side of the first semiconductor layer and adjacent to the second side of the first dielectric spacer;
• forming a second semiconductor layer on the second side of the first semiconductor layer and extending to the second dielectric spacer;
• stripping the anti-reflective coat from the gate after forming the second semiconductor layer;
• implanting a dopant into the second semiconductor layer;
• and,
• annealing the first semiconductor layer and the second semiconductor layer.