US 6,187,605 B1 · Method of forming a semiconductor device for a light valve

Abstract

A semiconductor substrate is utilized to integrally form a drive circuit and a pixel array to produce a transparent semiconductor device for a light valve. The semiconductor device for a light valve is constructed of a semiconductor substrate composed of a bulk single crystal silicon having an opaque thick portion and a thin transparent portion. A pixel array is formed in the transparent portion. A drive circuit is formed in a top face of the opaque portion. A transparent support substrate is laminated to the top face of the semiconductor substrate for reinforcement. A bulk portion of the semiconductor substrate is removed from a back face thereof by selective etching to provide the transparent portion.

Claims19

Dependent claims

A method of producing a semiconductor device for a light valve, comprising the steps:

forming a pixel array and a drive circuit on a major face of a semiconductor substrate comprised of a single crystal wafer;
thereafter laminating a transparent support substrate on the major face of the semiconductor substrate;
and selectively removing a thickness of the semiconductor substrate from a back face opposite to the major face thereof over a portion which includes the pixel array.

Dependencies are inferred from the claim text.

Facts

Application

08/308,564Filed 19 Sep 1994 · division

Priority

JP 4-22050419 Aug 1992

Granted

13 Feb 2001

Term ends

Not estimatedThe source records don’t support an estimate.

Classification8 codes

H10D 86/40
Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless…
G02F 1/13454
Conductors connecting electrodes to cell terminals: drivers integrated on the active matrix substrate
H10D 86/201
Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless…
H10D 86/60
Characterised by multiple TFTs: wherein the TFTs are in active matrices

Method of forming a semiconductor device for a light valve

Life of this patent

Method of forming a semiconductor device for a light valve

Life of this patent

Abstract

Claims19