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US 6,187,412 B1Granted
Silicon article having columns and method of making
AssigneeInternational Business Machines Corporation
InventorsMichael D. Armacost, Peter D. Hoh, Son V. Nguyen
Life of this patent
Estimating the term…
Abstract
A silicon article including a silicon base and columns extending from the silicon base. The columns define a gap between the columns which is devoid of material so that the article can act as a filter or heat sink. Also disclosed is a method of making the silicon article.
Claims19
A silicon article comprising:
- a single crystal silicon base portion formed from a single crystal silicon wafer;
- and
- a plurality of columns extending from, and in direct contact with, said base portion, said columns being circular or elliptical in crossection and comprising polysilicon or a metal, said columns defining open areas between said columns along their entire height.
Dependencies are inferred from the claim text.