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US 6,187,201 B1Granted
System for producing ultra-pure water
AssigneeNomura Micro Science Co., Ltd.
InventorsMitsugu Abe, Yoshiaki Noma
Life of this patent
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Abstract
A system for producing ultra-pure water having an electrodialysis unit 1, which has a membrane selectively permeable to monovalent cations and a membrane selectively permeable to monovalent anions, and a reverse osmosis unit 5 which is connected after the electrodialysis unit 1 in series.
Claims8
A system for producing ultra-pure water consisting essentially of:
- an electrodialysis unit comprising a membrane selectively permeable to monovalent cations and a membrane selectively permeable to monovalent anions;
- and
- a reverse osmosis unit which is connected after the electrodialysis unit in series and to which a diluate from the electrodialysis unit is introduced.
Process for producing ultra-pure water consisting essentially of the steps of:
- introducing water to be treated into an electrodialysis unit depending on the use of membranes selectively permeable to monovalent cations and of membranes selectively permeable to monovalent anions, and introducing the treated water into a reverse osmosis unit.
Dependencies are inferred from the claim text.