Tungsten doped crucible and method for preparing same
AssigneeMEMC Electronic Materials, Inc.
InventorsRichard Joseph Phillips, Steven Jack Keltner
Life of this patent
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Abstract
A process for preparing a quartz crucible having a tungsten doped layer on the inside surface, outside surface, or both the inside surface and the outside surface is disclosed. One or more surfaces of the crucible is exposed to a vaporous tungsten source to anneal the tungsten into the crucible surface and create a tungsten doped layer which behaves similarly to a bubble free layer upon use in a crystal pulling process.
Claims37
A process for preparing a quartz crucible having a tungsten doped layer, the crucible having an inside surface and an outside surface, the process comprising depositing tungsten on a surface of the crucible and diffusing the tungsten into the surface of the crucible.
A process for preparing a quartz crucible having two tungsten doped layers, the crucible having an inside surface and an outside surface, the process comprising:
- depositing tungsten on the inside surface of the crucible and diffusing the tungsten into the inside surface;
- and
- depositing tungsten on the outside surface of the crucible and diffusing the tungsten into the outside surface.
A process for preparing a quartz crucible having a tungsten doped layer on an inside surface, the crucible having an inside surface and an outside surface, the process comprising:
- energizing a tungsten source to heat the source and produce a heated vapor comprising tungsten, the source being energized within the crucible, the environment defined by the interior of the crucible;
- and
- exposing the inside surface of the crucible to the heated tungsten vapor to diffuse tungsten into the surface of the crucible.
A process for preparing a quartz crucible having a tungsten doped layer, the crucible having an inside and an outside surface, the process comprising:
- applying a layer of a tungsten-containing compound to a surface of the crucible;
- drying the compound on the crucible surface;
- applying a layer of silica onto the coated surface;
- and
- annealing the crucible at a temperature of between about 550° C. and about 900° C. to interdiffuse the compound and silica layer and create a layer containing at least about 100 ppba of tungsten in the crucible.
A process for preparing a quartz crucible having a tungsten doped layer, the crucible having an inside and an outside surface, the process comprising:
- mixing a tungsten-containing compound and a silica containing gel;
- applying the mixture to a surface of the crucible;
- allowing the mixture to dry on the surface;
- and
- annealing the crucible at a temperature of between about 550° C. and about 900° C. to create a layer having at least about 100 ppba of tungsten in the crucible.
A crucible having a tungsten doped layer on an inside surface, the tungsten doped layer on the inside surface having a concentration of no less than about 100 ppba tungsten and a thickness of between about 0.1 millimeter and about 4 millimeters.
A crucible having a tungsten doped layer on an outside surface, the tungsten doped layer on the outside surface having a concentration of no less than about 100 ppba tungsten and a thickness of between about 0.1 millimeter and about 6 millimeters.
A crucible having a tungsten doped layer on an inside surface and a tungsten doped layer on an outside surface, the tungsten doped layer on the inside surface having a concentration of no less than about 100 ppba tungsten and a thickness of between about 0.1 millimeter and about 4 millimeters and the tungsten doped layer on the outside surface having a concentration of no less than about 100 ppba tungsten and a thickness of between about 0.1 millimeter and about 6 millimeters.
A crucible containing a tungsten dopant, the crucible having an inside surface, an outside surface, and a central plane equidistant between the inside surface and the outside surface, the tungsten dopant being distributed between the inside surface and the central plane such that the density of the tungsten dopant decreases from the inside surface toward the central plane to create a region between about 0.1 and about 4 millimeters thick having a tungsten concentration of at least about 100 ppba and the tungsten dopant being distributed between the outside surface and the central plane such that the density of the tungsten dopant decreases from the outside surface toward the central plane to create a region between about 0.1 and about 6 millimeters thick having a tungsten concentration of at least about 100 ppba.
A crucible for holding a charge of molten silicon, the crucible comprising a tungsten doped layer with the layer having a concentration of at least about 100 ppba tungsten and a thickness of at least about 0.1 millimeters.
An apparatus for diffusing tungsten into a surface of a quartz crucible to create a tungsten doped layer, the quartz crucible having an inside surface and an outside surface, the apparatus comprising:
- a horizontal support for supporting the quartz crucible, the quartz crucible being positioned on the horizontal support such that the open end of the crucible is in contact with the horizontal support;
- a tungsten source extending through the horizontal support and into the interior of the supported crucible;
- a power source for energizing and heating the tungsten source to produce a heated vapor comprising tungsten;
- a gas inlet located in the horizontal support positioned to introduce a purging gas into the supported crucible to purge oxygen from the interior of the supported crucible;
- and
- a gas outlet located in the horizontal support positioned to remove the purging gas from the interior of the supported crucible.
Dependencies are inferred from the claim text.