Separation of CF4 and C2F6 from a perfluorocompound mixture
AssigneeAmerican Air Liquide, Inc.
InventorYao-En Li
Life of this patent
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Abstract
A process for separating at least one of CF4 and C2F6 from a gas. The process includes the steps of: (a) contacting a gas mixture comprising (i) at least one of CF4 and C2F6, (ii) at least one of NF3, CHF3, and N2, and (iii) SF6 with a membrane at conditions effective to obtain a retentate stream rich in SF6 and at least one of CF4 and C2F6, and a permeate stream rich in at least one of NF3, CHF3, and N2; and (b) contacting the retentate stream with an adsorbent at conditions effective to adsorb SF6 and produce a product stream rich in at least one of CF4 and C2F6.
Claims12
A process for separating at least one of CF4 and C2F6 from a gas, said process comprising the steps of:
- (a) contacting a gas mixture comprising (i) at least one of CF4 and C2F6, (ii) at least one of NF3, CHF3, and N2, and (iii) SF6 with a membrane at conditions effective to obtain a retentate stream rich in SF6 and at least one of CF4 and C2F6, and a permeate stream rich in at least one of NF3, CHF3, and N2;
- and
- (b) contacting said retentate stream with an adsorbent at conditions effective to adsorb SF6 and produce a product stream rich in at least one of CF4 and C2F6.
A process for separating CF4 and C2F6 from a gas, said process comprising the steps of:
- (a) contacting a gas mixture comprising CF4, C2F6, NF3, CHF3, N2, and SF6 with a membrane at conditions effective to obtain a retentate stream rich in SF6, CF4, and C2F6, and a permeate stream rich in NF3, CHF3, and N2;
- and
- (b) contacting said retentate stream with an adsorbent at conditions effective to adsorb SF6 and produce a product stream rich in CF4 and C2F6.
Dependencies are inferred from the claim text.