Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions

An apparatus for reducing perfluorocompound (PFC) emissions from a processing chamber said apparatus comprising:

• a vessel chamber, defining a fluid conduit having an inlet port and an outlet port, said vessel chamber being made from a ceramic insulating material;
• a PFC oxidizing agent in said fluid conduit;
• a plasma generation system capable of exciting PFC gases present in said fluid conduit into a plasma state, said plasma generation system comprising a coil surrounding at least a portion of said vessel chamber;
• first and second electrodes within said vessel chamber;
• and
• a voltage source operatively coupled to at least one of said first and second electrodes to create a voltage field between said electrodes and collect particulate matter on surface areas of said first and second electrodes.

An apparatus for reducing perfluorocompound (PFC) emissions from a processing chamber, said apparatus comprising:

• a vessel chamber, defining a fluid conduit having an inlet port and an outlet port;
• a PFC oxidizing agent in said fluid conduit;
• and
• a plasma generation system capable of exciting PFC gases present in said fluid conduit into a plasma state wherein said plasma generation system comprises a hollow cathode reactor having a cathode and an anode;
• wherein said PFC oxidizing agent comprises silicon containing residue and particles collected within said fluid conduit.

An apparatus for reducing perfluorocompound (PFC) emissions from a processing chamber, said apparatus comprising:

• a vessel chamber, defining a fluid conduit having an inlet port and an outlet port;
• a particle trapping system including first and second electrodes and a voltage source, operatively coupled to said electrodes, for applying a voltage between the electrodes to collect electrically charged particulate matter on surfaces of said first and second electrodes within said fluid conduit as said matter is exhausted through said fluid conduit;
• and
• a plasma generation system capable of exciting PFC gases present in said fluid conduit into a plasma state.

An apparatus for reducing perfluorocompound emissions from a processing chamber, said apparatus comprising:

• a first electrode comprising an electrode wall enclosing an inner chamber therein, the electrode wall defining an inlet and an outlet in communication with the inner chamber;
• a second electrode disposed within the inner chamber, the first and second electrodes having opposing surfaces defining a fluid conduit therebetween, the fluid conduit communicating the inlet with the outlet and defining one or more collection areas therebetween, the collection areas being structured and arranged to collect particulate matter flowing through the fluid conduit and to inhibit egress of the particulate matter from the apparatus;
• a source of an effluent PFC gas coupled to said inlet of said fluid conduit;
• a PFC oxidizing agent in said fluid conduit;
• and
• a voltage source, operatively coupled to apply a voltage between the electrodes to collect electrically charged particulate matter on the opposing electrode surfaces.

An apparatus for reducing perfluorocompound emissions from a processing chamber, said apparatus comprising:

• a first electrode comprising an electrode wall enclosing an inner chamber therein, the electrode wall defining an inlet and an outlet in communication with the inner chamber;
• a second electrode disposed within the inner chamber, the first and second electrodes having opposing surfaces defining a fluid conduit therebetween, the fluid conduit communicating the inlet with the outlet and defining one or more collection areas therebetween, the collection areas being structured and arranged to collect particulate matter flowing through the fluid conduit and to inhibit egress of the particulate matter from the apparatus;
• a source of an effluent PFC gas coupled to said inlet of said fluid conduit;
• a PFC oxidizing agent in said fluid conduit;
• a voltage source, operatively coupled to apply a voltage between the electrodes to collect electrically charged particulate matter on the opposing electrode surfaces;
• and
• a plasma generation system, operatively coupled to supply power to at least one of the electrodes to form a plasma from gases present in said fluid conduit;
• wherein the first electrode comprises a perimetrical wall and one or more substantially vertical wall members extending from the perimetrical wall into the inner chamber, the wall members each having an end remote from the perimetrical wall.

An apparatus for reducing perfluorocompound (PFC) emissions from a processing chamber, said apparatus comprising:

• (a) a vessel chamber defining a fluid conduit having an inlet port and an outlet port, said vessel chamber communicatively coupled to said processing chamber at said inlet port and said vessel chamber comprising:
• (i) a plurality of first electrodes, each first electrode having an interior surface defining a portion of said fluid conduit;
• (ii) a plurality of second cathodes, each second cathode having an interior surface defining a portion of said fluid conduit;
• and
• (iii) a plurality of insulation barriers, each insulation barrier being positioned between one of said first and second electrodes and cathodes and each insulation barrier having an interior surface defining a portion of said fluid conduit;
• (b) a source of an effluent PFC gas coupled to said inlet of said fluid conduit;
• (c) a PFC oxidizing agent in said fluid conduit;
• and
• (d) a plasma generation system, operatively coupled to said plurality of first electrodes, for supplying a voltage to said plurality of first electrodes to form a plasma from perfluorocompound gases present in said fluid conduit.