Sheet processing method
AssigneesTokyo Electron Limited, Ohmiya Ind. Co., Ltd.
InventorsTatsuya Nishida, Kenji Miyachi, Syujiro Oka
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AssigneesTokyo Electron Limited, Ohmiya Ind. Co., Ltd.
InventorsTatsuya Nishida, Kenji Miyachi, Syujiro Oka
Estimating the term…
A processing apparatus of the invention includes a rotary processing part for rotating and drying plural sheets of objects to be processed collectively in order to allow the object to be rotated immediately after they are accommodated in the rotary processing part and a balance adjusting mechanism for adjusting balance of the rotary processing part by moving counterweights in accordance with the number of the objects. Further the processing apparatus further includes a counter for counting the number of the objects accommodated in the rotary processing part and a control unit for controlling the balance adjusting operation of the balance adjusting mechanism in accordance with a predetermined relationship between the number of objects and the respective positions of the counterweights.
A method of processing plural sheets of objects to be processed while making use of a processing apparatus including a rotary processing part for rotating and drying plural sheets of the objects, counting means located outside of said rotary processing part for counting the number of objects, and balance adjusting means having at least one counterweight for adjusting the balance of said rotary processing part, said method comprising the steps of:
A method of processing plural sheets of objects to be processed while making use of a processing apparatus including a processing part for processing plural sheets of the objects, a rotary processing part for rotating and drying plural sheets of objects, counting means located outside of said rotary processing part for counting the number of the objects, and balance adjusting means having at least one counterweight for adjusting the balance of said rotary processing part, said method comprising the steps of:
Dependencies are inferred from the claim text.