Polisher
AssigneeEbara Corporation
InventorsNorio Kimura, Yu Ishii
Life of this patent
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Abstract
A polisher comprises a turn table having first and second end surfaces which are substantially normal to an axis of the turn table. The first end surface defines a polishing surface for polishing an article. A drive shaft is connected to the turn table in such a manner that the shaft extends along the axis of the turn table from the second end surface of the turn table. The polisher further includes a cooling system which comprises a cooling fluid path provided in the turn table for passing a cooling fluid therethrough to deprive the polishing surface of heat generated in a polishing operation and a fluid coupler provided at the center of the first end surface of the turn table for fluidly connecting the cooling fluid path with a cooling fluid supply outside of the turn table.
Claims9
A polisher comprising:
- a turn table having first and second end surfaces which are substantially normal to an axis of said turn table, said first end surface defining a polishing surface for polishing an article,
- a drive shaft connected to said turn table and extending along the axis of said turn table outwardly from said second end surface of said turn table, the drive shaft being adapted to rotatably drive the turn table, and
- a cooling system including a cooling fluid path provided in said turn table for passing a cooling fluid therethrough to deprive said polishing surface of a heat generated in a polishing operation and a fluid coupler provided at the center of said first end surface of said turn table for fluidly connecting said cooling fluid path with a cooling fluid supply outside of said turn table.
Dependencies are inferred from the claim text.