Apparatus and method for dispensing ink on an object
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKuo-Chen Huang, Hsiao-Tzu Wang
Life of this patent
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Abstract
A method and apparatus for dispensing ink on an object by utilizing an ink dispensing device mounted on a guide rail system so that the device can be freely moved two-dimensionally for dispensing ink at any desirable location on the surface of an object. The activation of the ink dispensing device can be advantageously controlled by either a foot operated switch, a hand operated switch or a voice operated switch. A counter may optionally be used on the apparatus such that the number of times the activation device was activated can be accurately recorded as an indication of defect counts or any other counts.
Claims15
An apparatus for dispensing ink on an object comprising:
- a stage for holding an object in a horizontal position,
- an ink dispensing means comprising an ink reservoir and an ink dispensing head,
- a first guide rail for slidably supporting said ink dispensing means and allowing said ink dispensing means to slide on said first guide rail in a first direction, said first guide rail having two ends each being supported by a mounting block,
- a pair of second guide rails mounted spaced apart, each of said second guide rails adapted for slidably mounting one of said mounting blocks thereto such that said first guide rail moves relative to said pair of second guide rails in a second direction perpendicular to said first direction,
- an activation means for controlling a preset flow of ink through said ink dispensing means, and
- a calibration stand for setting a height for said ink dispensing head.
A method for dispensing ink marks on a wafer surface comprising the steps of:
- providing a base for holding a wafer in a horizontal position,
- slidably mounting an ink dispensing means comprising an ink reservoir and an ink dispensing head onto a first guide rail such that said ink dispensing means is capable of sliding in a first direction, said first guide rail having two ends each supported by a mounting block,
- slidably mounting said mounting blocks onto a pair of second guide rails such that said first guide rail slides on said pair of second guide rails in a second direction,
- calibrating a height of said ink dispensing head with a calibration stand, and
- activating said ink dispensing head to dispense an ink drop when said ink dispensing means is moved to a predetermined location on said wafer surface.
Dependencies are inferred from the claim text.