Method of cleaving a brittle material using a point heat source for providing a thermal stress
AssigneeNEC Corporation
InventorHiroshi Sawada
Life of this patent
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Abstract
A method of determining optimum heating conditions for applying a pulse laser point heat source onto a strip of a brittle material at its position in the vicinity of a tip of a crack of the strip for cleaving the strip by a thermal stress, wherein at least one of a non-dimensional pulse time of the pulse laser point heat source, a non-dimensional distance of the pulse laser point heat source from the tip of the crack, and a non-dimensional heating area is decided so that a ratio of non-dimensional stress intensity factor to temperature takes just or approximately a maximum value.
Claims20
A method of determining optimum heating conditions for applying a pulse laser point heat source onto a strip of a brittle material at its position in the vicinity of a tip of a crack of said strip for cleaving said strip by a thermal stress, the method comprising the step of:
- selecting at least one heating condition from among a non-dimensional pulse time of said pulse laser point heat source, a non-dimensional distance of said pulse laser point heat source from said tip of said crack, and a non-dimensional heating area so that a ratio of non-dimensional stress intensity factor to temperature takes just or approximately a maximum value,
- wherein said ratio of non-dimensional stress intensity factor to temperature is defined by 2K1/{αET(πW)}, said non-dimensional pulse time is defined by 4κt/W2, said non-dimensional distance is defined by D/W, and said non-dimensional heating area is defined by R/D, where α is a linear thermal expansion coefficient of said strip, κ is a thermal diffusivity of said strip, E is a modulus of longitudinal elasticity of said strip, T is an increased temperature of a heating point of said strip, t is a pulse time of said pulse laser point heat source, W is a width defined as a distance between a cleaving-intended line and a side edge of said strip, R is a radius of a beam spot of said pulse laser point heat source, and D is a distance of a center position of said beam spot of said pulse laser point heat source from a tip of said crack of said strip.
A method of determining optimum heating conditions for applying a pulse laser point heat source onto a strip of a brittle material at its position in the vicinity of a top of a crack of said strip for cleaving said strip by a thermal stress, the method comprising the step of:
- selecting at least one heating condition from among a non-dimensional pulse time of said pulse laser point heat source, a non-dimensional distance of said pulse laser point heat source from said tip of said crack, and a non-dimensional heating area so that a ratio of non-dimensional stress intensity factor to temperature takes lust or approximately a maximum value,
- wherein said ratio of non-dimensional stress intensity factor to temperature is defined by 2K1/{αET(πW)}, said non-dimensional pulse time is defined by 4κt/W2, said non-dimensional distance is defined by D/W, and said non-dimensional heating area is defined by W/D, where α is a linear thermal expansion coefficient of said strip, κ is a thermal diffusivity of said strip, E is a modulus of longitudinal elasticity of said strip, T is an increased temperature of a heating point of said strip, t is a pulse time of said pulse laser point heat source, W is a width defined as a distance between a cleaving-intended line and a side edge of said strip, R is a radius of a beam spot of said pulse laser point heat source, and D is a distance of a center position of said beam spot of said pulse laser point heat source from a tip of said crack of said strip.
A method of cleaving a strip of a brittle material along a predetermined cleaving line by applying a pulse laser point heat source onto said strip of said brittle material to locally apply a thermal stress in the vicinity of a tip of a crack of said strip, the method comprising the steps of:
- selecting at least one heating condition from among a non-dimensional pulse time of said pulse laser point heat source, a non-dimensional distance of said pulse laser point heat source from said tip of said crack, and a non-dimensional heating area so that a ratio of non-dimensional stress intensity factor to temperature takes just or approximately a maximum value,
- wherein said ratio of non-dimensional stress intensity factor to temperature is defined by 2K1/{αET(πW)}, said non-dimensional pulse time is defined by 4κt/W2, said non-dimensional distance is defined by D/W, and said non-dimensional heating area is defined by R/D. where α is a linear thermal expansion coefficient of said strip, κ is a thermal diffusivity of said strip, E is a modulus of longitudinal elasticity of said strip, T is an increased temperature of a heating point of said strip, t is a pulse time of said pulse laser point heat source, W is a width defined as a distance between a cleaving-intended line and a side edge of said strip, R is a radius of a beam spot of said pulse laser point heat source, and D is a distance of a center position of said beam spot of said pulse laser point heat source from a tip of said crack of said strip;
- and
- cleaving the strip by applying the pulse laser point heat source onto said strip under the selected heating condition.
A method of cleaving a strip of a brittle material along a predetermined cleaving line by applying a pulse laser point heat source onto said strip of said brittle material to locally apply a thermal stress in the vicinity of a tip of a crack of said strip, the method comprising the steps of:
- selecting at least one heating condition from among a non-dimensional pulse time of said pulse laser point heat source, a non-dimensional distance of said pulse laser point heat source form said tip of said crack, and a non-dimensional heating area so that a ratio of non-dimensional stress intensity factor to temperature takes just or approximately a maximum value, wherein said ratio of non-dimensional stress intensity factor to temperature is defined by 2K1/{αET(πW)}, said non-dimensional pulse time is defined by 4κt/W2, said non-dimensional distance is defined by D/W, and said non-dimensional heating area is defined by R/W, where α is a linear thermal expansion coefficient of said strip, κ is a thermal diffusivity of said strip, E is a modulus of longitudinal elasticity of said strip, T is an increased temperature of a heating point of said strip, t is a pulse time of said pulse laser point heat source, W is a width defined as a distance between a cleaving-intended line and a side edge of said strip, R is a radius of a beam spot of said pulse laser point heat source, and D is a distance of a center position of said beam spot of said pulse laser point heat source from a tip of said crack of said strip;
- and
- cleaving the strip by applying the pulse laser point heat source onto said strip under the selected heating condition.
Dependencies are inferred from the claim text.