Integrated gas delivery system

A gas delivery system comprising:

• (A) a mounting block including
• (a) opposing first and second end surfaces;
• (b) top and side surfaces extending between the opposing end surfaces;
• (c) inlet passageways extending from the first end surface in a direction generally towards the second end surface, the inlet passageways being separately connectable to a source of purge gas and a source of process gas;
• (d) outlet passageways extending from the second end surface of the block in a direction generally towards the first end surface, the outlet passageways being separately connectable to a process chamber and a purge reservoir;
• (e) a plurality of gas component stations spaced on the top surface between the end surfaces, wherein each of the inlet and the outlet passageways is connected to at least one of the component stations;
• and
• (f) connecting passageways within the block extending generally parallel with the top surface, the connecting passageways connecting the component stations such that, when gas control components are mounted to the component stations of the block, gas flow can be directed from each inlet passageway to one of the outlet passageways, as desired;
• and
• (B) gas control components mounted to the component stations of the block, the gas control components controlling gas flow between the passageways of the block.