Semiconductor pressure sensor for sensing fluid pressure
AssigneeFujikoki Corporation
InventorsJunichi Miyano, Akira Sawada, Keiji Sasaki
Life of this patent
Estimating the term…
Loading patent…
AssigneeFujikoki Corporation
InventorsJunichi Miyano, Akira Sawada, Keiji Sasaki
Estimating the term…
The object of the present invention is to provide a pressure sensor comprising a pressure sensing element of a plurality of resistors on a semiconductor board, wherein said pressure sensing element is fixed inside the housing firmly and airtightly. A pressure sensor 10 comprising a housing 11 made of metal material, and a pressure sensing element mounted on a semiconductor board 13 positioned in the interior of said housing for sensing pressure, wherein said housing 11 comprises a liquid induction hole 11d, an inner area connecting to said liquid induction hole and having an opening in an upper portion, and an annular protrusion 11g formed in the peripheral of an opening of said liquid induction hole at a bottom portion of said inner area, characterized in that said pressure sensing element 13 is welded airtightly to said protrusion 11g of said housing 11 through a seat 21 comprising an opening 21a at the center thereof formed of a pressure sensing element mounting member 21-1 and a stem connecting member 20d, and a stem 20 having an opening 20d at the center thereof.
A pressure sensor comprising:
A pressure sensor comprising:
A pressure sensor comprising:
A pressure sensor comprising:
A pressure sensor comprising:
Dependencies are inferred from the claim text.