Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample
AssigneeVeeco Instruments Inc.
InventorsRobert Daniels, Serguei Magonov
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AssigneeVeeco Instruments Inc.
InventorsRobert Daniels, Serguei Magonov
Estimating the term…
A method of operating a probe-based instrument comprises placing a probe of the probe-based instrument in an operative state in which the probe interacts with a heated sample, measuring a parameter of probe operation indicative of a characteristic of the heated sample, and during the measuring step, maintaining interaction between the probe and the heated sample that is substantially free of influences caused by condensation on the probe. The maintaining step includes heating the probe to a temperature at which the measured parameter of probe operation is substantially free of influences caused by condensation on the probe. Heating the probe reduces or eliminates the formation of condensation on the probe from water or materials that have evaporated from the heated sample. The invention is especially useful in connection with atomic force microscopes and other probe-based instruments.
A method of operating an atomic force microscope having a probe, said method comprising:
An atomic force microscope comprising:
A method of operating an atomic force microscope having a probe, said method comprising:
A method of operating an atomic force microscope having a probe, said method comprising:
A method of operating an atomic force microscope having a probe, said method comprising:
Dependencies are inferred from the claim text.