Method of manufacturing surface acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsMichio Kadota, Toshimaro Yoneda, Koji Fujimoto
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Abstract
A method of manufacturing a surface acoustic wave device having a piezoelectric substrate and an interdigital transducer provided thereon, includes the steps of forming a coating layer made of inorganic material or organic material on the piezoelectric substrate so as to cover the interdigital transducer and etching the coating layer via a laser light to adjust an operation frequency of the surface acoustic wave device.
Claims16
A method of manufacturing a surface acoustic wave device having a piezoelectric substrate and an interdigital transducer provided thereon, comprising the steps of:
- forming the surface acoustic wave device including the piezoelectric substrate and the interdigital transducer;
- determining whether an operation frequency of the surface acoustic wave device is to be increased or decreased;
- selecting an inorganic material for a coating layer if the operation frequency is to be increased and selecting an organic material for a coating layer if the operation frequency is to be decreased;
- forming, based on a result of the selecting step, the coating layer made of either the inorganic material or the organic material on the piezoelectric substrate so as to cover the interdigital transducer;
- and
- etching the coating layer to adjust the operation frequency of the surface acoustic wave device.
A method of manufacturing a surface acoustic wave device comprising the steps of:
- providing a piezoelectric substrate;
- forming an interdigital transducer on a surface of the piezoelectric substrate;
- determining whether an operation frequency of the surface acoustic wave device is to be increased or decreased;
- selecting an inorganic material for a coating layer if the operation frequency is to be increased and selecting an organic material for a coating layer if the operation frequency is to be decreased;
- forming, based on a result of the selecting step, the coating layer made of either the inorganic material or the organic material on the piezoelectric substrate to cover the interdigital transducer;
- and
- etching the coating layer to increase or decrease the operation frequency of the surface acoustic wave device.
Dependencies are inferred from the claim text.