Hybrid integrated electro-optical modulator of the pockels effect type
AssigneeFrance Telecom
InventorsDominique Bosc, Pierre Benech, Smaïl Tedjini, Alain Morand
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Abstract
A Pockels-effect electro-optical modulator including a light guide having a core made of an inorganic amorphous material, and on which a structure is superposed that is made up of two electrode-forming layers between which an electro-optical polymer is interposed, said modulator being characterized in that said structure is superposed directly on the material of the core of the light guide. The transitions between the active and passive zones are advantageously adapted to minimize losses.
Claims10
A Pockels-effect electro-optical modulator including a light guide having a core made of an inorganic amorphous material, and on which a structure is superposed that is made up of two electrode-forming layers between which an electro-optical polymer is interposed, said structure being superposed directly on the material of the core of the light guide, said modulator being characterized in that it includes a layer of cladding-forming material which extends over the core material on either side of the structure comprising the two electrode-forming layers and the electro-optical polymer, and which, in the vicinity of said structure, has transition zones in which its thickness decreases down to the electrode superposed on the core material, the electro-optical polymer covering said cladding-forming material in the transition zones defined in this way.
A method of making an electro-optical modulator, said method being characterized by the following steps:
- a structure is made that includes a light guide having a core that is unclad and that is made of an inorganic amorphous material;
- a layer of a material serving to constitute cladding for said core is deposited on said structure;
- said layer is etched through a mask;
- an electrode is deposited in the bottom of the etched zone;
- an electro-optical polymer is deposited on the electrode and on the edges of the etched zone;
- and
- an electro-optical polymer is deposited in the etched zone.
Dependencies are inferred from the claim text.