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US 6,184,977 B2Granted
Inspection method and inspection device
AssigneeMinolta Co., Ltd.
InventorFutoshi Ishida
Life of this patent
Estimating the term…
Abstract
An method and device for inspecting for surface defects, internal defects, and surface-adhered foreign matter on semitransparent materials. An illuminating device transmits light, that is then collimated through a collimating lens unit, through an object to be inspected. The light then transmits through the object to be inspected an eventually is detected by a detector. Any defects in the object to be inspected will be detected.
Claims7
An inspection device comprising:
- a light source;
- a collimating lens unit which collimates light emitted from said light source into substantially parallel light;
- a holder which holds an inspection object in the path of said collimated light;
- and
- a detector disposed in the path of light through said inpsection object to detect light transmitted through the inspection object;
- and
- a light shield member residing in a first portion of the optical path between the inspection object and the collimating lens unit, wherein
- the light in the remaining portion of the optical path transmitted through the inspection object does not directly enter the detector if the inspection object has no optical defects in such remaining portion of the optical path.
5 more elements
Dependencies are inferred from the claim text.