Substrate transport apparatus, substrate holding apparatus and substrate processing apparatus
AssigneeNikon Corporation
InventorsShinji Mizutani, Hiroaki Narusima
Life of this patent
Estimating the term…
Abstract
Spoke shaped (petal shaped) through holes or cavities are provided at the center or a substrate holder which attaches and holds a substrate over substantially the entire surface, to allow vertical movement of a center-up member having a plurality of radially extended spoke shaped mounting portions. As a result, degradation in the flatness of a substrate at the time of attaching the substrate to the mounting surface of the substrate holder is minimized.
Claims19
A transport apparatus provided with:
- a first holding member having a mounting face with substantially the same shape as that of a substrate to be processed for supporting a substrate on said mounting face,
- a second holding member for holding a rear face of a substrate, which projects from one portion of the mounting face of said first holding member at a time of transporting the substrate, in order to hold the substrate in an upper side space of the mounting face of said first holding member, and
- a transport arm member for moving a substrate between at least one of a standby position and a carry out position, and the upper side space of said first holding member in order to transport the substrate from a predetermined standby position onto the mounting face of said first holding member, or to transport the substrate on said mounting face to a predetermined transport position, wherein
- said second holding member comprises a plurality of spoke shape mounting portions which are arranged so as to extend in a radial direction from an approximately central portion of the mounting face of said first holding member, and radial through portions or cavity portions are formed on the mounting face of said first holding member for accommodating said plurality of spoke shape mounting portions.
A substrate holding apparatus having a mounting face that is substantially the same shape as a substrate to be processed, and constructed such that an attachment force acts between said mounting face and the substrate during processing of said substrate, wherein radial through portions or cavity portions are formed in a central portion of the mounting face for accommodating radial mounting members which project from said mounting face and support the substrate in an upper side space of said mounting face when the transported substrate is mounted on said mounting face or when the substrate on said mounting face is to be removed.
A substrate holding apparatus used with a substrate holder having a mounting face that is substantially the same shape as a substrate to be processed and which applies an attachment force between the mounting face and the substrate during processing of the substrate, for relatively protruding from a portion of said mounting face and supporting the substrate in an upper side space of said mounting face, when mounting a substrate on or removing a substrate from the mounting face, wherein
- a support portion which relatively protrudes from the portion of said mounting face for contacting with the rear face of the substrate is formed in a plurality of spokes so as to be accommodated without contact in radial through portions or cavity portions formed in the mounting face of said substrate holder.
Dependencies are inferred from the claim text.