Method of making a reflective type LCD including providing a protective metal film over a connecting electrode during at least one portion of the manufacturing process

A method for producing a substrate of a reflection type liquid crystal display device including a transparent substrate, a substrate having a reflective metal film, a liquid crystal layer interposed between the substrates, a pixel electrode for driving the liquid crystal layer by applying a voltage to the liquid crystal layer, and a connecting electrode electrically connected to the pixel electrode through a bus line for inputting a signal from outside, the method comprising the steps of:

• forming and patterning a conductive film for the connecting electrode on the substrate on which a reflective metal film is to formed, and
• forming and patterning the reflective metal film,
• wherein the reflective metal film is superimposed on the conductive film for the connecting electrode via a protective metal film at least once between the step of forming the conductive film and the step of patterning the reflective metal film, and
• wherein the protective metal film is patterned before the reflective metal film is superimposed on the conductive film for the connecting electrode via the protective metal film between the step of forming the conductive film for the connecting electrode and the step of patterning the reflective metal film.

A method for producing a substrate of a reflection type liquid crystal display device including a transparent substrate, a substrate having a reflective metal film, a liquid crystal layer interposed between the substrates, a pixel electrode for driving the liquid crystal layer by applying a voltage to the liquid crystal layer, and a connecting electrode electrically connected to the pixel electrode through a bus line for inputting a signal from outside, the method comprising the steps of:

• forming and patterning a conductive film for the connecting electrode on the substrate on which a reflective metal film is to be formed;
• forming and patterning the reflective metal film;
• wherein the reflective metal film is superimposed on the conductive film for the connecting electrode via a protective metal film at least once between the step of forming the conductive film and the step of patterning the reflective metal film;
• forming the protective metal film on the conductive film for the connecting electrode, between the step of forming the conductive film and the step of patterning the reflective metal film;
• forming an interlayer insulator on which the reflective metal film is to be formed, under the condition that the protective metal film on the conductive film for the connecting electrode is exposed;
• and
• patterning the interlayer insulator,
• wherein after the step of patterning the reflective metal film, the method further comprises the step of removing the protective metal film so as to expose the conductive film for the connecting electrode.

A method for producing a substrate of a reflection type liquid crystal display device including a transparent substrate, a substrate having a reflective metal film, a liquid crystal layer interposed between the substrates, a pixel electrode for driving the liquid crystal layer by applying a voltage to the liquid crystal layer, and a connecting electrode electrically connected to the pixel electrode through a bus line for inputting a signal from outside, the method comprising the steps of:

• forming and patterning a conductive film for the connecting electrode on the substrate on which a reflective metal film is to be formed;
• forming and patterning the reflective metal film;
• forming an interlayer insulator on which the reflective metal film is to be formed, under the condition that a protective metal film on the conductive film for the connecting electrode is exposed between the step of forming the conductive film and the step of patterning the reflective metal film;
• patterning the interlayer insulator;
• and
• forming a protective metal film on the interlayer insulator,
• wherein the reflective metal film is superimposed on the conductive film for the connecting electrode via the protective metal film at least once between the step of forming the conductive film and the step of patterning the reflective metal film, and
• wherein after the step of patterning the reflective metal film, the method further comprises the step of removing the protective metal film so as to expose the conductive film for the connecting electrode.