US 6,184,607 B2 · Driving strategy for non-parallel arrays of electrostatic actuators sharing a common electrode

Abstract

An electrostatic actuator array having at least one cell, in which the individual cells share a common electrode. Each cell includes first and second electrodes separated by a distance and having a moveable diaphragm mounted there between for conducting a voltage potential thereto. One of the pair is movable with respect to the other, and the pair are positioned to move upon application of a voltage potential thereto by electrodes attached thereto. A voltage potential producing an alternate polarity field generated from a single DC power supply is selectively provided to the electrodes to cause the movement. The preferred signals from the power supply are uni-polar square wave signals, preferably deriving the alternate polarity field from a DC current having time allocation of signals to present alternating fields to each actuator. The individual cells are configured in an actuator array wherein some cells operate out of phase with adjoining cells. The plurality of actuation cells equals n, having 2n electrodes, where n is an integer of at least 2. A preferred actuator array comprises n actuation cells working out of phase with 2n electrodes driven with n+1 unipolar signals.

Claims18

Dependent claims

An electrostatic actuator array having a plurality of individual cells sharing a common electrode, said cells each comprising:

first and second electrodes separated by a distance and having a moveable diaphragm mounted there between for conducting a voltage potential thereto, said moveable diaphragm being a common electrode with said first and second electrodes to form a pair of actuator units said pairs of actuator units being positioned to move upon application of a voltage potential thereto;
and
a voltage source operably connected for selectively providing a repeating cycle of voltage potential to said first and second electrodes and said moveable diaphragm to cause said movement, said voltage source producing an alternate polarity field generated from a single DC power supply by applying a zero voltage component and a DC voltage component to said first and second electrodes and said moveable diaphragm at different times in said repeating cycle to produce said alternate polarity field.

Dependencies are inferred from the claim text.

Driving strategy for non-parallel arrays of electrostatic actuators sharing a common electrode

Life of this patent

Driving strategy for non-parallel arrays of electrostatic actuators sharing a common electrode

Life of this patent

Abstract

Claims18