Stage construction incorporating magnetically levitated movable stage
AssigneeNikon Corporation
InventorHisao Ohzeki
Life of this patent
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Abstract
The stage construction of the present invention includes a fixed stage and a magnetically levitated movable stage which is driven in mutually perpendicular X, Y, and Z axis directions with respect to the fixed stage by magnetic action between itself and the fixed stage. The fixed stage includes a magnet and a closed plenum in which the magnet is sealed. The movable stage includes a magnetic material which is opposed to the magnet and which experiences an attractive or repulsive magnetic force with respect to the magnet.
Claims48
A stage device comprising:
- a fixed stage including:
- (a) a magnet member to generate a magnetic force;
- and
- (b) a closed plenum to seal said magnet member therein, said closed plenum having a two-dimensional plane;
- a movable stage to move, in response to said magnetic force, above said two-dimensional plane;
- and
- a position detector that detects a position of said movable stage, at least a part of said position detector being fixed to said movable stage.
A stage device comprising:
- a fixed stage including:
- (a) a coil member to generate a magnetic force;
- and
- (b) a closed plenum to seal said coil member therein, said closed plenum having a two-dimensional plane;
- and
- a movable stage to move, in response to said magnetic force above said two-dimensional plane;
- and
- a position detector that detects a position of said movable stage, at least a part of said position detector being fixed to said movable stage.
A stage device comprising:
- a fixed stage;
- a movable stage to move among a plurality of predetermined positions in a two-dimensional plane;
- a plurality of magnets disposed on one among said fixed stage and said movable stage;
- a plurality of coils disposed on one among said fixed stage and said movable stage;
- a closed plenum to seal said plurality of coils therein, said plenum having a plane substantially parallel to the two-dimensional plane;
- a fluid supply device, connected to said plenum, that cools said plurality of coils;
- and
- a position detector that detects a position of said movable stage, at least a part of said position detector being fixed to said movable stage.
A stage incorporating a magnetically levitated movable stage, having a fixed stage and a magnetically levitated movable stage which is driven with respect to said fixed stage by magnetic action between said movable stage and said fixed stage, said stage comprising:
- a plurality of magnets disposed on one of said fixed stage and said movable stage;
- a plurality of coils disposed on the other said fixed stage and said movable stage;
- a first plenum which seals said plurality of coils;
- a second plenum different from said first plenum which surrounds said plurality of coils;
- and
- a coolant medium supplied to said second plenum.
Dependencies are inferred from the claim text.