Surface analyzing apparatus with anti-vibration table
AssigneesSeiko Instruments Inc., Mitsubishi Denki Kabushiki Kaisha
InventorsShigeru Wakiyama, Naohiko Fujino
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Abstract
A probe microscope carries a so-called active anti-vibration table in which a vibration to a anti-vibration table plate by a floor vibration is detected by a shift meter, an acceleration sensor or the like, and a vibration having an opposite phase to that of this vibration is given to the anti-vibration table plate, thereby reducing an external vibration component from the floor vibration also in the apparatus installation site having frequencies from a low frequency component to a high frequency component.
Claims35
A scanning probe microscope with a stage for observing and evaluating a shape, a condition or a property of a sample surface, comprising:
- a rough stage for rough positioning and a fine motion mechanism for fine positioning for relatively moving in three dimensions a sample and a detecting portion for detecting a physical quantity received from the sample, control means for keeping constant a distance between the sample and the detecting portion, an anti-vibration table for reducing a low frequency vibration transmission caused by installation circumstances, a controlling electric portion for controlling the detecting portion for detecting the physical quantity, a computer for control, means for detecting a vibration of an anti-vibration table plate disposed on the anti-vibration table, means for adding a vibration having an opposite phase to that of the anti-vibration table plate to the anti-vibration table plate thereby forcibly reducing the vibration thereof, and a noise reduction cover covering the anti-vibration table and the structures supported thereon for reducing the influence of a high frequency acoustic vibration on the scanning probe microscope.
A scanning probe microscope for measuring a physical property of a sample, comprising:
- a three-dimensionally displaceable table plate supporting thereon a detecting portion for detecting a physical property of the sample, and rough and fine positioning mechanisms for three-dimensionally positioning and scanning the detecting portion relative to the sample;
- a displaceable anti-vibration table supporting thereon the table plate, the table plate being three-dimensionally displaceable relative to the anti-vibration table;
- detecting means for detecting vibration of the table plate caused by relatively low frequency vibration of a floor which supports the scanning probe micropscope;
- means for applying to the table plate a vibration having a phase opposite that of the vibration detected by the detecting means to thereby forcibly reduce relatively low frequency vibration of the table plate caused by the floor vibration;
- and a noise reduction cover covering the table plate and the anti-vibration table for reducing the influence of relatively high frequency acoustic vibration on the scanning probe microscope.
Dependencies are inferred from the claim text.