Particle analyzer system
AssigneeYokogawa Electric Corporation
InventorsTsuguo Sawada, Takehiko Kitamori, Toshitsugu Ueda, Seiichi Naitou, Hisao Takahara, Yukihiko Takamatsu
Life of this patent
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Abstract
A particle analyzer system that reduces size and cost, wherein particles are introduced into a cell, then the particles are irradiate in the cell with a laser beam, then atomic emission of the particles generated by the irradiation of the laser beam is transmitted, then a spectrum is obtained of the photo emission so transmitted, and the spectrum of the photo emission is detected and the wavelength of the laser beam is, other than the wavelength of the emission of the particles, is used to provide a filter to block the intrusion of the wavelength of the laser beam in a stage proceeding the photo emission.
Claims15
A particle analyzer comprising:
- a cavity provided with a cell;
- a spectrum detector;
- means for introducing particles to be analyzed into said cell;
- means for applying a laser beam into said cavity to cause irradiation with said laser beam said particles within said cell to cause photo emission of said particles;
- fiber optic transmission means for gathering said photo emission over a wide range, and for concentrating and transmitting concurrently all of the gathered photo emission, said transmission means having one end thereof connected to said cavity and another end thereof connected to said spectrum detector and being a single line;
- blocking means connected directly to said one end of said transmission means and within said cavity for blocking from transmission by said transmission means wavelengths outside of said wavelengths of photo emission caused by said particles;
- grating means disposed within said spectrum detector for receiving all of the photo emission transmitted by said transmission means and for providing therefrom spectral lines thereof;
- and
- an array of a plurality of photo detectors parallely disposed within said spectrum detector, including at least three adjacent photo detectors, for detecting concurrently at least three adjacent ones of all of the spectral lines provided by said grating means thereby to identify a peak emission from the at least three adjacent photo detectors and thereby determine elemental components and sizes of said particles.
A particle analyzer system comprising:
- a cavity provided with a cell;
- a spectrum detector;
- means for introducing particles to be analyzed into said cell;
- means for applying microwaves into said cavity to cause irradiation with microwave plasma said particles within said cell to cause photo emission of the particles;
- a single line fiber optic transmission means for gathering said photo emission over a wide range, and for concentrating and transmitting concurrently all of the gathered photo emission, said transmission means having one end thereof connected to said cavity and another end thereof connected to said spectrum detector;
- blocking means connected directly to said one end of said transmission means and within said cavity for blocking from transmission by said transmission means wavelengths not produced as photo emission by said particles;
- grating means disposed within said spectrum detector for receiving all of the photo emission transmitted by said transmission means and for providing therefrom spectral lines thereof;
- and
- an array of a plurality of photo detectors parallely disposed within said spectrum detector, including at least three adjacent photo detectors, for detecting concurrently at least three adjacent on of all of the spectral lines provided by said grating means thereby to identify a peak emission from the at least three adjacent photo detectors and thereby determine elemental components and sizes of said particles.
Dependencies are inferred from the claim text.