Semiconductor processing method of providing dopant impurity into a semiconductor substrate

A semiconductor processing method comprising:

• providing a semiconductor substrate having an n-type region and p-type region, and having field oxide over the n-type and p-type regions;
• defining active area regions in each of the n-type and p-type substrate regions;
• simultaneously forming channel stop isolation implants beneath field oxide in one of the n-type and p-type substrate regions and electrically conductive active area implants in the active area regions of the other of the n-type and p-type regions;
• and
• wherein the field oxide regions comprise birds beak regions, the simultaneously forming channel stop isolation implants and electrically conductive active area implants also positioning a portion of the active area implants beneath birds beak regions in said other of the n-type and p-type regions.

A semiconductor processing method of providing dopant impurity into a semiconductor substrate comprising the following steps:

• providing a semiconductor substrate, the substrate comprising two regions, one of the regions being a first region having a blanket doping of a first type conductivity enhancing dopant, the other region being a second region having a blanket doping of a second type conductivity enhancing dopant;
• defining field oxide regions in each of the first and second regions
• defining active area regions between the field oxide regions;
• masking active area regions of the first region while leaving field oxide regions of the first region unmasked, and masking field oxide regions of the second region while leaving at least some active area regions of the second region unmasked;
• doping through the unmasked portions of the two regions;
• wherein the field oxide regions comprise birds beak regions, the masking leaving at least portions of the birds beak regions unmasked, the doping comprising doping through birds beak regions in the second region to position a portion of the active area implants beneath birds beak regions in the second region;
• and
• after the doping, providing gates over the active area regions of the first and second regions, the gates comprising patterned polysilicon.