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US 6,183,891 B2Granted
Magnetic head and method of manufacture
AssigneeOnStream, Inc.
InventorsEeltje A. Draaisma, Franciscus A. Pronk
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AssigneeOnStream, Inc.
InventorsEeltje A. Draaisma, Franciscus A. Pronk
Estimating the term…
Method of manufacturing a thin-film magnetic head comprising an inductive transducing system. A non-magnetic, insulating material for forming a first insulation layer (13), on which an inductive transducing element (15) is formed, is deposited on a plane basic surface (11). Subsequently, a non-magnetic, insulating material for forming a second insulation layer (19) is deposited on the first insulation layer and the inductive transducing element formed thereon. Subsequently, material is removed in an area proximate to a head face (30) to be formed for forming an aperture extending through the first and the second insulation layer and reaching as far as the basic surface, whereafter a non-magnetic, insulating material for forming a gap layer (29) is deposited in the aperture. Subsequently, a soft-magnetic material for forming a first soft-magnetic layer is deposited on the gap layer, whereafter the soft-magnetic layer (31), as well as adjoining, uncovered layer parts of deposited non-magnetic, insulating material are planarized to form a plane surface. Subsequently, a soft-magnetic material is deposited on this surface for forming a second soft-magnetic layer (35) which, jointly with the first soft-magnetic layer, constitutes a magnetic flux guide (36).
A method of manufacturing a layered magnetic head having a head face and an inductive transducing system, the method comprising the steps of depositing a non-magnetic, insulating material for forming a first insulation layer on a substrate, depositing a non-magnetic, insulating material on the first insulation layer for forming a second insulation layer on the first insulation layer and forming an inductive transducing element thereon, forming a magnetic flux guide bounding a non-magnetic gap layer adjoining the basic surface forming the head face so that the flux guide and the gap layer terminate in the head face, and after the formation of the second insulation layer, removing material in a head in which the head face is formed, and forming an aperture extending through the first and the second insulation layer and reaching as far as the basic surface, depositing a non-magnetic, insulating material for forming the gap layer in the aperture, and depositing soft-magnetic material on the gap layer for forming a first soft-magnetic layer, planarizing the first soft-magnetic layer to form a plane surface on which a soft-magnetic material is subsequently deposited for forming a second soft-magnetic layer which, jointly with the first soft-magnetic layer, constitutes the magnetic flux guide.
A method of manufacturing a layered magnetic head having a head face and comprising an inductive transducing system comprising the steps of depositing a non-magnetic, insulating material for forming a first insulation layer on a substrate, depositing a non-magnetic, insulating material on the first insulation layer for forming a second insulation layer on the first insulation layer and forming an inductive transducing element thereon, forming a magnetic flux guide bounding a non-magnetic gap layer forming the head face so that the flux guide and the gap layer terminate in the head face, and after the formation of the second insulation layer, removing material in head in which the head face is formed and forming an aperture extending through the first and the second insulation layer and reaching as far as the basic surface, depositing a soft-magnetic material in the aperture for forming a first soft-magnetic layer, planarizing the first soft-magnetic layer to form a plane surface on which a non-magnetic, insulating material is subsequently deposited for forming the gap layer, and depositing a soft-magnetic material for forming a second soft-magnetic layer constituting the magnetic flux guide.
A method of manufacturing a layered magnetic head having a head face and comprising an inductive transducing system comprising the steps of depositing a non-magnetic, insulating material for forming a first insulation layer on a substrate, depositing a nonmagnetic, insulating material for forming a second insulation layer, and forming the inductive transducing element thereon, forming a magnetic flux guide bounding a non-magnetic gap layer forming the head face so that the flux guide and the gap layer terminate in the head face, and prior to the formation of the first insulation layer depositing a soft-magnetic material on a basic surface in an area in which the head face is formed thereby forming a first soft-magnetic layer and on adjoining parts of the basic surface for forming the first insulation layer, consecutively forming the inductive transducing element and the second insulation layer and planarizing as far as the first soft-magnetic layer is effected for forming a plane surface on which a non-magnetic, insulating material for forming the gap layer and a soft-magnetic material for forming a second soft-magnetic layer constituting the flux guide are consecutively deposited.
Dependencies are inferred from the claim text.