Magneto-resistance effect device and method of manufacturing the same
AssigneeNEC Corporation
InventorJun-Ichi Fujita
Life of this patent
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Abstract
In a magneto-resistance effect device including a plurality of magnetic dots each of which is formed by magnetic material on a substrate and appears a magneto-resistance effect by applying an external magnetic field, the magnetic dots are arranged on the substrate in a two-dimensional array. The two-dimensional array has a plurality of rows along a column direction and a plurality of columns along a row direction. The magnetic dots include at least first magnetic dots and second magnetic dots. The first magnetic dots are arranged on first rows while the second magnetic dots are arranged on second rows. The first magnetic dot is different from the second magnetic dot in shape.
Claims20
A magneto-resistance effect device which includes a plurality of magnetic dots, each of which is formed by magnetic material on a substrate and where a magneto-resistance effect occurs by applying an external magnetic field, wherein:
- said magnetic dots are arranged on said substrate in an array extending in two dimensions, said array having a plurality of rows along a column direction and a plurality of columns along a row direction;
- and
- said magnetic dots include first magnetic dots and second magnetic dots, said first magnetic dots being arranged on first rows and said second magnetic dots being arranged on second rows;
- said first magnetic dots being different from said second magnetic dots in shape.
A magneto-resistance effect device which includes a plurality of magnetic dots, each of which is formed by magnetic material on a substrate and where a magneto-resistance effect occurs by applying an external magnetic field, wherein:
- said magnetic dots are arranged on said substrate in an array extending in two dimensions, said array having a plurality of rows along a column direction and a plurality of columns along a row direction;
- and
- said magnetic dots include first magnetic dots and second magnetic dots, said first magnetic dots being arranged on first rows and said second magnetic dots being arranged on second rows;
- said first magnetic dots being different from said second magnetic dots in the magnetic material.
A magneto-resistance effect device which includes a plurality of magnetic dots, each of which is formed by magnetic material on a substrate and where a magneto-resistance effect occurs by applying an external magnetic field, wherein:
- said magnetic dots are arranged on said substrate in an array extending in two dimensions, said array having a plurality of rows along a column direction and a plurality of columns along a row direction;
- and
- said magnetic dots include first magnetic dots and second magnetic dots, said first magnetic dots being arranged on first rows and said second magnetic dots being arranged on second rows;
- said first magnetic dots being different from said second magnetic dots in saturation magnetization.
A method of manufacturing a magneto-resistance effect device having a substrate, comprising the steps of:
- depositing an iron film on said substrate;
- depositing an aluminum film on said iron film;
- forming a resist-pattern on said aluminum film;
- etching said aluminum film by the use of said resist-pattern to pattern said aluminum film;
- removing said resist-pattern;
- etching said iron film by using the patterned aluminum film as a mask so as to form a plurality of magnetic dots on said substrate in an array extending in two dimensions, and
- depositing a chromium film on a surface of said device.
A method of manufacturing a magneto-resistance effect device having a substrate, comprising the steps of:
- positioning a mask which has a first opening corresponding to a first magnetic dot and a second opening corresponding to a second magnetic dot over said substrate;
- vaporizing iron material via said mask in a perpendicular direction for said mask to form said first and second magnetic clots on said substrate in an array extending in two dimensions;
- vaporizing first aluminum material via said mask from a left oblique direction for said mask to form a first aluminum layer on said first and second magnetic dots;
- introducing oxygen for said first aluminum layer in vacuum atmosphere to form a tunnel barrier of an aluminum oxide on said first aluminum layer;
- vaporizing second aluminum material via said mask from a right oblique direction for said mask to form a second aluminum layer on said first and second magnetic dots;
- and
- said first aluminum layer and said second aluminum layer being coupled via said tunnel barrier so that said first and second magnetic dots being wired via said tunnel barrier to each other.
Dependencies are inferred from the claim text.