Magnetic thin film and method for forming the same
AssigneeFujitsu Limited
InventorSanae Shimizu
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Abstract
A magnetic thin film forming method forms a magnetic thin film on a conductive film by electroplating using a plating bath containing Ni ions, Fe ions, Mo ions and an organic acid. A concentration of the organic acid in the plating bath is 3-20 times a concentration of the Mo ions in the plating bath. An organic acid concentration in the plating bath versus an Mo ion concentration of the plating bath is set to be a suitable value, whereby an Mo mixed amount in the magnetic thin film can be set to be a suitable value. Accordingly, a magnetic thin film having a large specific resistance value and good magnetic characteristics can be formed.
Claims9
A method for forming a magnetic thin film on a conductive film by electroplating using a sulphate-chloride type acid plating bath containing Ni ions, Fe ions, Mo ions and an organic acid,
- a concentration of the organic acid in the plating bath being 3-20 times a concentration of the Mo ions in the plating bath.
A magnetic thin film formed on a conductive film formed by electroplating using a sulphate-chloride type acid plating bath containing Ni ions, Fe ions, Mo ions and an organic acid,
- the magnetic thin film being formed by setting a concentration of the organic acid in the plating bath to be 3-20 times a concentration of the Mo ions in the plating bath, and containing Mo by 1-5 atomic %.
Dependencies are inferred from the claim text.