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US 6,183,816 B2Granted
Method of fabricating the coating
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Kenji Itoh, Shigenori Hayashi
Life of this patent
Estimating the term…
Abstract
In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.
Claims68
A method for fabricating a magnetic recording medium, said method comprising the steps of:
- forming a magnetic material over a substrate;
- activating a surface of the magnetic material by a first plasma;
- providing the substrate between a first and a second electrode;
- generating a second plasma between the first and second electrodes;
- forming a diamond-like carbon film over said surface of the magnetic material with the second plasma after the activating step,
- wherein a pressure between the first and second electrodes is 15-100 Torr,
- wherein an interval between the first and second electrodes is 6 mm or less.
4 more elements
A method for fabricating a magnetic recording medium, said method comprising the steps of:
- forming a magnetic material over a substrate;
- activating a surface of the magnetic material by a first plasma;
- providing the substrate between a first and a second electrode;
- generating a second plasma between the first and second electrodes;
- forming a diamond-like carbon film over said surface of the magnetic material having a thickness of 50 to 2000 Å with the second plasma after the activating step,
- wherein a pressure between the first and second electrodes is 15-100 Torr,
- wherein an interval between the first and second electrode is 6 mm or less.
4 more elements
A method for fabricating a magnetic recording medium, said method comprising the steps of:
- forming a magnetic material over a substrate;
- activating a surface of the magnetic material by a first plasma in a first chamber;
- providing the substrate between a first and a second electrode in a second chamber different from said first chamber;
- generating a second plasma between the first and second electrodes;
- forming a diamond-like carbon film over said surface of the magnetic material with the second plasma after the activating step,
- wherein a pressure between the first and second electrodes is 15-100 Torr,
- wherein an interval between the first and second electrode is 6 mm or less.
4 more elements
A method for fabricating a magnetic recording medium, said method comprising the steps of:
- forming a magnetic material over a substrate;
- activating a surface of the magnetic material by a first plasma;
- providing the substrate between a first and a second electrode;
- generating a second plasma between the first and second electrodes;
- forming a diamond-like carbon film over said surface of the magnetic material with the second plasma after the activating step,
- wherein a pressure between the first and second electrodes is 15-100 Torr,
- wherein an interval between the first and second electrode is 6 mm or less, and
- wherein the activating step and the forming said diamond-like carbon film step are performed continuously.
5 more elements
A method for fabricating a magnetic recording medium, said method comprising the steps of:
- forming a magnetic material over a substrate;
- activating a surface of the magnetic material by a first plasma in a first location;
- providing the substrate between a first and a second electrode in a second location different from said first location;
- generating a second plasma between the first and second electrodes;
- forming a diamond-like carbon film over said surface of the magnetic material with the second plasma after the activating step,
- wherein a pressure between the first and second electrodes is 15-100 Torr,
- wherein an interval between the first and second electrode is 6 mm or less.
4 more elements
A method for fabricating a magnetic recording medium, said method comprising the steps of:
- forming a magnetic material over a substrate;
- activating a surface of the magnetic material by a first plasma;
- providing the substrate between a first and a second electrode;
- generating a second plasma between the first and second electrodes;
- forming a diamond-like carbon film over said surface of the magnetic material with the second plasma after the activating step,
- wherein a pressure between the first and second electrodes is 15-100 Torr,
- wherein an interval between the first and second electrode is 6 mm or less, and
- wherein at least one rare gas selected from the group consisting of He, Ar, Xe, Ne, Kr and the mixture thereof is added to the second plasma.
5 more elements
A method for fabricating a diamond-like carbon film, said method comprising the steps of:
- activating a surface of a substrate by a first plasma;
- providing the substrate between a first and a second electrode;
- generating a second plasma between the first and second electrodes;
- forming said diamond-like carbon film over said surface of the substrate with the second plasma after the activating step,
- wherein a pressure between the first and second electrodes is 15-100 Torr,
- wherein an interval between the first and second electrode is 6 mm or less.
3 more elements
A method for fabricating a diamond-like carbon film, said method comprising the steps of:
- activating a surface of a substrate by a first plasma;
- providing the substrate between a first and a second electrode;
- generating a second plasma between the first and second electrodes;
- forming said diamond-like carbon film having a thickness of 50 to 2000 Å over said surface of the substrate with the second plasma after the activating step,
- wherein a pressure between the first and second electrodes is 15-100 Torr,
- wherein an interval between the first and second electrode is 6 mm or less.
3 more elements
A method for fabricating a diamond-like carbon film, said method comprising the steps of:
- activating a surface of a substrate by a first plasma in a first chamber;
- providing the substrate between a first and a second electrode in a second chamber different from said first chamber;
- generating a second plasma between the first and second electrodes;
- forming said diamond-like carbon film over said surface of the substrate with the second plasma after the activating step,
- wherein a pressure between the first and second electrodes is 15-100 Torr,
- wherein an interval between the first and second electrode is 6 mm or less.
3 more elements
A method for fabricating a diamond-like carbon film, said method comprising the steps of:
- activating a surface of a substrate by a first plasma;
- providing the substrate between a first and a second electrode;
- generating a second plasma between the first and second electrodes;
- forming said diamond-like carbon film over said surface of the substrate with the second plasma after the activating step,
- wherein a pressure between the first and second electrodes is 15-100 Torr,
- wherein an interval between the first and second electrode is 6 mm or less,
- wherein the activating step and the forming said diamond-like carbon film step are performed continuously.
4 more elements
A method for fabricating a diamond-like carbon film, said method comprising the steps of:
- activating a surface of a substrate by a first plasma in a first location;
- providing the substrate between a first and a second electrode in a second location different from said first location;
- generating a second plasma between the first and second electrodes;
- forming said diamond-like carbon film over said surface of the substrate with the second plasma after the activating step,
- wherein a pressure between the first and second electrodes is 15-100 Torr,
- wherein an interval between the first and second electrode is 6 mm or less.
3 more elements
A method for fabricating a diamond-like carbon film, said method comprising the steps of:
- activating a surface of a substrate by a first plasma;
- providing the substrate between a first and a second electrode;
- generating a second plasma between the first and second electrodes;
- forming said diamond-like carbon film over said surface of the substrate with the second plasma after the activating step,
- wherein a pressure between the first and second electrodes is 15-100 Torr,
- wherein an interval between the first and second electrode is 6 mm or less, and
- wherein at least one rare gas selected from the group consisting of He, Ar, Xe, Ne, Kr and the mixture thereof is added to the second plasma.
4 more elements
A method for fabricating a film comprising carbon, said method comprising the steps of:
- activating a surface of a substrate by a first plasma;
- providing the substrate between a first and a second electrode;
- generating a second plasma between the first and second electrodes;
- forming said film comprising carbon over said surface of the substrate with the second plasma after the activating step,
- wherein a pressure between the first and second electrodes is 15-100 Torr,
- wherein an interval between the first and second electrode is 6 mm or less.
3 more elements
A method for fabricating a film comprising carbon, said method comprising the steps of:
- activating a surface of a substrate by a first plasma;
- providing the substrate between a first and a second electrode;
- generating a second plasma between the first and second electrodes;
- forming said film comprising carbon having a thickness of 50 to 2000 Å over said surface of the substrate with the second plasma after the activating step,
- wherein a pressure between the first and second electrodes is 15-100 Torr,
- wherein an interval between the first and second electrode is 6 mm or less.
3 more elements
A method for fabricating a film comprising carbon, said method comprising the steps of:
- activating a surface of a substrate by a first plasma in a first chamber;
- providing the substrate between a first and a second electrode in a second chamber different from said first chamber;
- generating a second plasma between the first and second electrodes;
- forming said film comprising carbon over said surface of the substrate with the second plasma after the activating step,
- wherein a pressure between the first and second electrodes is 15-100 Torr,
- wherein an interval between the first and second electrode is 6 mm or less.
3 more elements
A method for fabricating a film comprising carbon, said method comprising the steps of:
- activating a surface of a substrate by a first plasma;
- providing the substrate between a first and a second electrode;
- generating a second plasma between the first and second electrodes;
- forming said film comprising carbon over said surface of the substrate with the second plasma after the activating step,
- wherein a pressure between the first and second electrodes is 15-100 Torr,
- wherein an interval between the first and second electrode is 6 mm or less,
- wherein the activating step and the forming said film step are performed continuously.
4 more elements
A method for fabricating a film comprising carbon, said method comprising the steps of:
- activating a surface of a substrate by a first plasma in a first location;
- providing the substrate between a first and a second electrode in a second location different from said first location;
- generating a second plasma between the first and second electrodes;
- forming said film comprising carbon over said surface of the substrate with the second plasma after the activating step,
- wherein a pressure between the first and second electrodes is 15-100 Torr,
- wherein an interval between the first and second electrode is 6 mm or less.
3 more elements
A method for fabricating a film comprising carbon, said method comprising the steps of:
- activating a surface of a substrate by a first plasma;
- providing the substrate between a first and a second electrode;
- generating a second plasma between the first and second electrodes;
- forming said film comprising carbon over said surface of the substrate with the second plasma after the activating step,
- wherein a pressure between the first and second electrodes is 15-100 Torr,
- wherein an interval between the first and second electrode is 6 mm or less, and
- wherein at least one rare gas selected from the group consisting of He, Ar, Xe, Ne, Kr and the mixture thereof is added to the second plasma.
4 more elements
Dependencies are inferred from the claim text.