Ink jet recording head and process of manufacturing the ink jet recording head
AssigneeSeiko Epson Corporation
InventorTsutomu Hashizume
Life of this patent
Estimating the term…
Abstract
An ink jet recording head includes: a piezoelectric body element 20 that is formed on a silicon substrate 10; an ink cavity 15 that is formed at a location of the silicon substrate 10 corresponding to the piezoelectric body element 20; and a jetting port 18 for jetting ink contained in the ink cavity 15. The ink cavity 15 has a beamlike ion implanted layer 19 that is not only interposed between at least a pair of confronting side walls 15a and 15b thereof while coming in contact with desired regions of such side walls 15a and 15b, but also formed so as to be distanced from other side walls 15c and 15d thereof.
Claims17
An ink jet recording head comprising:
- a piezoelectric body element being formed on a substrate;
- an ink cavity being formed at a location of the substrate corresponding to the piezoelectric body element, said ink cavity being elongated so as to have a pair of confronting side walls which are longer than a pair of further side walls;
- and
- and ink jetting port for jetting ink contained within the ink cavity,
- wherein the cavity has a beamlike portion that is interposed between the pair of confronting side walls while coming in contact with desired regions of the confronting side walls, and formed so as to be distanced from the further side walls, and
- wherein the desired regions are located more toward the piezoelectric body element than a middle portion of the ink cavity.
An ink jet recording head comprising:
- a piezoelectric body element being formed on a substrate;
- an ink cavity being formed at a location of the substrate corresponding to the piezoelectric body element, said ink cavity being elongated so as to have a pair of confronting side walls which are longer than a pair of further side walls;
- and
- an ink jetting port for jetting ink contained within the ink cavity,
- wherein the ink cavity has a beamlike portion that is interposed between the pair of confronting side walls while coming in contact with desired regions of the confronting side walls, and formed so as to be distanced from the further side walls, and
- wherein the beamlike portion comprises an impurity added layer formed within the ink cavity.
An ink jet recording head comprising:
- a piezoelectric body element being formed on a substrate;
- an ink cavity being formed at a location of the substrate corresponding to the piezoelectric body element;
- an ink jetting port for jetting ink contained within the ink cavity;
- and
- a beamlike portion disposed so as to extend across the ink cavity in a direction perpendicular to a displacement direction of the piezoelectric body element, such that both ends of the beamlike portion support one pair of confronting side walls of the ink cavity in order to prevent the side walls from deforming according to the displacement of the piezoelectric body element.
An ink jet recording head comprising:
- a piezoelectric body element being formed on a substrate;
- a plurality of ink cavities being formed at a location of the substrate corresponding to the piezoelectric body element and arranged side by side;
- and
- an ink jetting port for jetting ink contained within the respective ink cavities,
- wherein each of said ink cavities has a beamlike portion coming in contact with at least two side walls defining said respective ink cavities.
Dependencies are inferred from the claim text.