Intermediate metallic layer for flat packing and process for the production of a flat packing with such an intermediate layer
AssigneeBalzers Hochvakuum AG
InventorRoman Schertler
Life of this patent
Estimating the term…
Abstract
A vacuum packing configuration and installation for use therewith, has a first part and a second part. The first part includes a hydraulically or pneumatically expandable, medium-tight volume adapted to be acted upon by an hydraulic or pneumatic medium, with a wall facing the second part and forming sealing faces fastened on the first part. The wall is a resilient metal diaphragm.
Claims16
A vacuum packing configuration comprising a first and a second part which are spaced from each other in at least one area, the first part having a conduit extending to the at least one area for supplying a pressure medium;
- a resilient metal diaphragm, facing the second part and sealingly, rigidly and fixedly fastened on the first part along a periphery of the diaphragm and around the conduit to define a sealed space for receiving the pressure medium, the diaphragm having resilient beads which resiliently expand under control and influence of the pressure medium so that the diaphragm expands into sealing contact with the second part (11).
In a vacuum treatment installation with,
- a stator with an interior volume substantially in the form of a body of revolution for
- a rotor (22) which comprises a multiplicity of workpiece holding fixtures (28) spaced apart with respect to a rotational driving axis (A),
- the stator (20) comprises a multiplicity of treatment and/or transfer-through ports (40, 56) for treatment of a workpiece in each workpiece holding fixture (28),
- each of the workpiece holding fixtures (28) on the rotor (22) by being driven is directly positionable at each of the ports (40, 56), and
- a pressure medium packing configuration which seals each workpiece holding fixture (28) at each port against a remaining interior volume of the stator,
- the improvement comprising the packing configuration being a resilient metal diaphragm extending around each workpiece holding fixture and including inner and outer peripheries which are sealingly, rigidly and fixedly fastened to the rotor to define an annular space, the rotor including a conduit for receiving pressure medium, the conduit communicating with the annular space for supplying pressure medium to the space for acting on the diaphragm, the diaphragm having a bead extending near each of the inner and outer peripheries, each bead being resiliently expandable so that with pressure medium in the conduit, the diaphragm expands into sealing contact with the stator around each port.
Dependencies are inferred from the claim text.