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US 6,182,605 B2Granted
Apparatus for particle beam induced modification of a specimen
AssigneeAdvantest Corporation
InventorJurgen Frosien
Life of this patent
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Abstract
Apparatus for particle beam induced modification of a specimen, comprising a source for generating a particle beam, nozzles for supplying a gas in the region of the specimen, and electrodes which can be supplied with a variable voltage. Said electrodes are forming a tube and the nozzles, being integrated in the electrodes, are leading into the tube.
Claims9
Apparatus for particle beam induced modification of a specimen, comprising
- a source (1) for generating a particle beam (2)
- nozzles (3′a, 3′b . . . ) for supplying a gas in the region of the specimen (5), and
- electrodes (4′a, 4′b . . . which can be supplied with a variable voltage,
- characterized in that
- said electrodes are forming a tube and the nozzles, being integrated in the electrodes, are leading into the tube.
2 more elements
Dependencies are inferred from the claim text.