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US 6,182,513 B2Granted
Resonant sensor and method of making a pressure sensor comprising a resonant beam structure
AssigneeRadi Medical Systems AB
InventorsGoeran Stemme, Edvard Kaelvesten
Life of this patent
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Abstract
A resonant microbeam pressure sensor is disclosed, comprising a microbeam suspended in a diaphragm in at least one point by suspension elements. Pressure applied to the diaphragm will cause the resonance frequency of the beam to shift. This shift is detectable and proportional to the pressure. The device is manufactured by surface micromachining.
Claims13
A resonant microbeam pressure sensor comprising:
- a substrate;
- a flexible diaphragm provided on said substrate such as to form a cavity between said substrate and said diaphragm;
- and
- at least one resonant microbeam suspended by said diaphragm at one or more points such that said microbeam is suspended beneath said diaphragm.
1 more element
A resonant microbeam pressure sensor, comprising:
- a sheet of polysilicon;
- at least one attachment element for attaching to a diaphragm of said sensor, said attachment element having a finite length and stiffness to provide a lever for transferring mechanical stress from said diaphragm to said microbeam structure;
- wherein
- said microbeam structure has a resonance frequency that significantly differs from that of the diaphragm to which it is to be attached.
1 more element
Dependencies are inferred from the claim text.