System and method for laser ultrasonic bond integrity evaluation
OwnerBernard Siuinventor
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OwnerBernard Siuinventor
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A nondestructive bond testing system is implemented using a pulse laser that sends a single or multiple pulse(s) of controlled magnitude and bombards an object of interest causing a thermoelastic excitation response. This excitation in turn induces an ultrasonic propagation along or through the surface material. By detecting, capturing and interpreting these thermoelastic propagation signatures, the attachment condition of the joining materials is determined. The technique is a significant improvement over traditional mechanical pull, shear or contact type techniques. The techniques are implemented in automated high speed inspection systems suitable for real time manufacturing application. Particular applications include evaluating material joining in microelectronics manufacture (such as ball bonds) and thin coating processes.
A laser ultrasonic system for evaluating a bond between an element and a substrate, comprising:
A method for evaluating the integrity of a bond on an element, comprising the steps of:
A method for evaluating the integrity of a bond on an element, comprising the steps of:
A laser ultrasonic system for evaluating a bond between an element and a substrate, comprising:
Dependencies are inferred from the claim text.