High precision three-dimensional alignment system for lithography, fabrication and inspection

A micoralignment method using a high precision microalignment instrument, said instrument having a central control unit;

• a proximity detection unit and a coarse control unit both attached to an object to be aligned and coupled to the central control unit;
• a fine distance control unit strategically attached to the object to be aligned and coupled to the central control unit;
• and a sample holder for receiving a substrate;
• said method comprising the steps of:
• a) attaching the substrate to the sample holder;
• b) moving a scribing tool to proximate the substrate by the coarse control unit;
• c) monitoring the distances between the scribing tool and the substrate using the proximity detection unit;
• and
• d) moving the scribing tool to the desired alignment with the substrate.

A product with surface features produced by a method using a microlithography system, said system having a central control unit;

• a proximity detection unit and a coarse control unit both attached to a scribing tool and coupled to the central control unit;
• a fine distance control unit strategically attached to the scribing tool and coupled to the central control unit;
• and a sample holder for receiving a substrate;
• said method comprising the steps of:
• a) attaching the product to the sample holder;
• b) using the proximity detection unit to monitor the distances between the scribing tool and the substrate;
• c) moving the scribing tool to proximate the substrate;
• d) collecting signals by the central control unit from the proximity detection unit;
• e) aligning the scribing tool to the substrate by the axial and lateral movements of the fine distance control unit;
• and
• f) creating features on the surface of said product by the movement of the scribing tool in relation to the substrate.