US 6,180,523 B2Granted

Copper metallization of USLI by electroless process

AssigneeIndustrial Technology Research Institute

InventorsChwan-Ying Lee, Tzuen-Hsi Huang

Life of this patent

Estimating the term…

Loading patent…

Abstract

The invention provides three embodiments for forming Cu/Au contacts and interconnects using electroless deposition. The three embodiments have different adhesion and barrier layers for the electroless Cu or Au plugs. The invention discloses a technique of utilizing electroless deposition in USLI circuits. This metalization process is an additive and selective to provide conducting layers as well as an interconnection between layers of a multilevel conductive metal semiconductor device. The first embodiment uses adhesion layers formed of Ni, Al, polysilicon or PdSix; and a barrier layer composed of Ni—B, Ni, Pd, or Co and has first and second metal plugs formed by selective Cu or Au electroless processes. The second embodiment forms adhesion layers of PdSix. The third embodiment forms adhesion layers of activated Ti or Al. Cu or Au plugs are selectively electroless deposited to form interconnects.

Claims17

Dependent claims

A method of fabrication of a contact to a silicon substrate (10) using electroless deposition comprising the steps of:

a) forming a contact hole in an insulating layer exposing a substrate;
said contact hole defined by sidewalls of said insulating layer;
b) forming an adhesion layer on said sidewalls of said insulating layer and said exposed substrate;
(1) said adhesion layer is composed of a material selected from the group consisting of Al, Al alloys, polysilicon, Ni, palladium silicide, and amorphous silicon;
c) electrolessly depositing a first barrier layer on said adhesion layer;
(1) said first barrier layer is composed of a material selected from the group consisting of Ni, Pd, Co, and alloys of Ni, Pd, Co;
d) activating said first barrier layer using a PdCl2 containing solution;
e) selectively electrolessly plating a first metal over said first barrier layer filling said contact hole;
said first metal deposited using an electroless plating process;
said first metal layer is composed of a material selected from the group consisting Cu, Au and alloys of Cu or Au;
f) forming a second insulating layer over said first insulating layer, said first metal, said first barrier layer and said adhesion layer;
g) patterning said second insulating layer to form a via hole exposing said first metal;
h) forming a second barrier layer over said first metal;
said second barrier layer composed of a material selected from the group consisting of Ni, Pd or Co;
i) activating said second barrier metal using a PdCl2 containing solution;
and
j) selectively electroless plating a second metal over said first metal layer filling said via hole;
said second metal comprised of Au or Cu.

15 more elements

A method of fabrication of a contact to a silicon substrate using electroless deposition comprising the steps of:

a) forming an insulating layer over a substrate;
b) forming a first photoresist layer having first openings over said insulating layer;
c) forming a contact hole in said insulating layer exposing a substrate;
said contact hole defined by sidewalls of said insulating layer;
d) forming a first activation layer on said exposed substrate in said contact hole;
said first activation layer formed using a Pd containing solution;
e) forming a Palladium (Pd) layer on said first activation layer;
said Palladium (Pd) layer formed by plating or sputtering processes;
f) removing said first photoresist layer;
g) annealing said Palladium (Pd) layer and said first activation layer forming a Pd silicide layer in said contact hole on said substrate;
h) forming a barrier layer over said Palladium (Pd) silicide layer;
said barrier layer is composed of a material selected from the group consisting of Ni, Pd, Co and alloys of Ni, Pd, Co;
i) electrolessly depositing a first metal layer filling said contact hole;
said first metal layer composed of Cu or Au on said barrier layer;
j) forming a polysilicon layer over said first metal layer;
k) depositing a Palladium (Pd) layer over said Polysilicon layer using a electroless or sputtering process;
l) annealing said Palladium (Pd) layer and said polysilicon layer to form a Palladium silicide layer on said first metal layer;
m) forming a second insulating layer over said first insulating layer;
said second insulating layer having a second contact hole aligned with said first contact hole and exposing said Palladium silicide (PdSix) layer;
n) selectively electroless plating a second metal layer over said first metal layer filling said second contact hole;
said second metal comprising Cu or Au.

18 more elements

A method of fabrication of a contact to a silicon substrate using electroless deposition comprising the steps of:

a) forming an insulating layer over a substrate;
b) forming a first photoresist layer having first openings over said insulating layer;
c) forming a contact hole in said insulating layer exposing a substrate;
said contact hole defined by sidewalls of said insulating layer;
d) forming a first activation layer on said exposed substrate in said contact hole;
said first activation layer formed using a Pd containing solution;
e) electrolessly plating a Pd layer on said first activation layer;
said Palladium layer formed by platting or sputtering processes;
f) removing said first photoresist layer;
g) annealing said Palladium (Pd) layer and said first activation layer forming a Pd silicide layer in said contact hole on said substrate;
h) forming a barrier layer over said Pd silicide layer;
said barrier layer is composed of a material selected from the group consisting of Ni, Pd, Co and alloys of Ni, Pd, Co;
i) electrolessly depositing a first metal layer composed of Cu or Au on said barrier layer;
j) forming an adhesion layer over said first metal layer;
said adhesion layer composed of a material selected from the group consisting of Al or Ti;
k) depositing an second activation layer over said adhesion layer using said activation layer formed using a PdCl2 containing or zincate containing solution;
l) forming a second insulating layer over said first insulating layer;
said second insulating layer having a second contact hole aligned with said first contact hole and exposing said second activation layer;
m) electroless plating a second metal layer over said first metal layer filling said second contact hole;
said second metal comprised of Cu or Au.

17 more elements

A method of fabrication of a contact to a silicon substrate (10) using electroless deposition comprising the steps of:

a) forming a contact hole in an insulating layer exposing a substrate;
said contact hole defined by sidewalls of said insulating layer;
b) forming an adhesion layer on said sidewalls of said insulating layer and said exposed substrate;
(1) said adhesion layer is composed of a material selected from the group consisting of Al, Al alloys, polysilicon, Ni, palladium silicide, and amorphous silicon;
c) electrolessly depositing a first barrier layer on said adhesion layer;
(1) said first barrier layer is composed of electroless Nickel and having a thickness in a range of between about 1800 and 2200 Å and is formed using a electroless solution comprising:
Nickel sulfate at a concentration between 28 and 32 g/l, a Dimethlylamine Borane (DMAB) at a concentration between 2.8 and 32 g/l;
Sodium citrate at a concentration between about 25-35 g/l, and Ammonium Chloride at a concentration between about 28-32 g/l, at a Temperature between 58 and 62° C., and at a pH Value between 5.9 and 6.1;
d) activating said first barrier layer using a PdCl2 containing solution;
e) selectively electrolessly plating a first metal over said first barrier layer filling said contact hole;
said first metal deposited using an electroless plating process;
said first metal layer is composed of a material selected from the group consisting Cu, Au and alloys of Cu or Au;
f) forming a second insulating layer over said first insulating layer, said first metal, said first barrier layer and said adhesion layer;
g) patterning said second insulating layer to form a via hole exposing said first metal;
h) forming a second barrier layer over said first metal;
said second barrier layer composed of a material selected from the group consisting of Ni, Pd or Co;
i) activating said second barrier metal using a PdCl2 containing solution;
and
j) selectively electroless plating a second metal over said first metal layer filling said via hole;
said second metal comprised of Au or Cu.

17 more elements

A method of fabrication of a contact to a silicon substrate (10) using electroless deposition comprising the steps of:

a) forming a contact hole in an insulating layer exposing a substrate;
said contact hole defined by sidewalls of said insulating layer;
b) forming an adhesion layer on said sidewalls of said insulating layer and said exposed substrate;
(1) said adhesion layer is composed of a material selected from the group consisting of Al, Al alloys, polysilicon, Ni, palladium silicide, and amorphous silicon;
(2) said adhesion layer has a thickness in a range of between about 400 and 600 Å;
c) electrolessly depositing a first barrier layer on said adhesion layer;
(1) said first barrier layer is composed of electroless Nickel and having a thickness in a range of between about 1800 and 2200 Å and is formed using a electroless solution comprising:
Nickel sulfate at a concentration between 28 and 32 g/l, a Dimethlylamine Borane (DMAB) at a concentration between 2.8 and 32 g/l;
Sodium citrate at a concentration between about 25-35 g/l, and Ammonium Chloride at a concentration between about 28-32 g/l, at a Temperature between 58 and 62° C., and at a pH Value between 5.9 and 6.1;
d) activating said first barrier layer using a PdCl2 containing solution;
e) selectively electrolessly plating a first metal over said first barrier layer filling said contact hole;
said first metal deposited using an electroless plating process;
said first metal layer is composed of a material selected from the group consisting Cu, Au and alloys of Cu or Au;
(1) said first metal is comprised of Cu and is formed using an electrolessly plating solution comprising:
Copper Sulphate at a concentration in a range between about 6 and 7 g/L;
Sodium citrate at a concentration between 15 and 15.8 g/l and Nickel Sulphate at a concentration between about 0.4 and 6.0 g/l and Sodium Hypophosphite at a concentration at a range between 10 and 11 g/L, and Boric acid with a concentration between 4.5 and 5.5 g/L;
at a temp 62 and 68° C., and at a pH value between about 9.0 and 9.3;
f) forming a second insulating layer over said first insulating layer, said first metal, said first barrier layer and said adhesion layer;
g) patterning said second insulating layer to form a via hole exposing said first metal;
h) forming a second barrier layer over said first metal;
said second barrier layer composed of a material selected from the group consisting of Ni, Pd or Co;
i) activating said second barrier metal using a PdCl2 containing solution;
and
j) selectively electroless plating a second metal over said first metal layer filling said via hole;
said second metal comprised of Au or Cu;
(1) said first metal is comprised of Cu and is formed using an electrolessly plating solution comprising:
Copper Sulphate at a concentration in a range between about 6 and 7 g/L;
Sodium citrate at a concentration between 15 and 15.8 g/l and Nickel Sulphate at a concentration between about 0.4 and 6.0 g/l and Sodium Hypophosphite at a concentration at a range between 10 and 11 g/L, and Boric acid with a concentration between 4.5 and 5.5 g/L;
at a temp 62 and 68° C., and at a pH value between about 9.0 and 9.3.

26 more elements

Dependencies are inferred from the claim text.