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US 6,180,428 B2Granted
Monolithic scanning light emitting devices using micromachining
AssigneeXerox Corporation
InventorsEric Peeters, Decai Sun, G. A. Neville Connell, Ross D. Bringans, Raj B. Apte, Thomas L. Paoli, Patrick Y. Maeda, David K. Fork, Joel A. Kubby, Philip D. Floyd
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Abstract
A micro-machined movable light emitting assembly is formed on or from an undoped or pure III-V substrate or formed on or from a doped III-V substrate. The movable light emitting assemblies are to be actuated using force generators, to generate the various mechanical degrees of freedom depending on the type of stage suspension and actuation.
Claims1
A method of making a moving a micro-machined movable light emitting assembly, comprising:
- depositing light source forming layers on an undoped III-V substrate;
- etching a back side of the substrate to produce a III-V membrane with a thickness equal to the thickness of a light source support and a plurality of light source support suspension members;
- etching a front side of the substrate to perforate the shape of the light source support and the plurality of light source support suspension members thereby releasing the light source support from the substrate,
- wherein etching the front side of the substrate further comprises:
- perforating the shape of actuator combs having a fixed finger set and a movable finger set,
- further comprising:
- depositing an oxidation layer beneath the light source forming layers;
- and
- oxidizing the oxidation layer beneath the fixed finger set thereby electrically isolating the fixed finger set from the movable finger set.
6 more elements
Dependencies are inferred from the claim text.