Semiconductor supercapacitor system, method for making same and articles produced therefrom

A BaaTibOc thin film composite produced by:

• (A) applying onto a substrate a BaaTibOc coating wherein a and b are independently between from about 0.75 to about 1.25 and c is from about from 2.5 to 5.0;
• (B) drying the coated substrate at a temperature of from about 300° C. to about 500° C.;
• (C) annealing the dried coated substrate at a temperature from about 600° C. to about 800° C. until crystallization
• wherein the substrate and BaaTibOc are of high purity and further wherein steps A-C are conducted in a nitrogen-rich environment.

A MaBabTicOd thin film composite produced by the process which comprises:

• (A) applying onto a substrate a coating of BaaTibOc wherein a and b are independently about 0.75 to about 1.25 and c is about 2.5 to about 5.0 and between from about 0.01 to about 0.25 mol percent of additive M wherein M is Au, Cu, Ni3Al, Ru, or InSn;
• (B) drying the coated substrate at a temperature of from about 300° C. to about 500° C.;
• and
• (C) annealing the dried coated substrate at a temperature from about 600° C. to about 800° C. until crystallization
• wherein the substrate and BaaTidOc are of high purity and further wherein A-C are conducted in a nitrogen-rich environment.

A BaaTibOc thin film composite wherein a and b independently are from about 0.75 to about 1.25 and c is about 2.5 to about 5.0 produced by the process which comprises:

• (A) dissolving a reaction mixture of alcohol, barium diacetate and titanium alkoxide in ambient atmosphere;
• (B) forming an aqueous solution comprising the product of step (A), weak acid and acetyl acetone;
• (C) dipping a substrate into the solution of step (B);
• (D) drying the coating of step (C) at a temperature of from about 300° C. to about 500° C.;
• (E) annealing the product of step (D) at a temperature of from about 600° C. to about 800° C. until crystallization
• wherein the alcohol, barium diacetate, titanium alkoxide, weak acid and acetyl acetone have a purity of at least 95% and further wherein steps (A) through (E) are conducted in a dry nitrogen-rich atmosphere.

A MaBabTicOd thin film composite wherein M is Au, Cu, Ni3Al, Ru or InSn, a and b are independently about 0.75 to about 1.25, c is about 2.5 to about 5.0 and d is about 0.01 to about 0.25 produced by the process which comprises:

• (A) reacting barium diacetate and acetic acid in the presence of an alcohol and a glycol to produce titanium tetraacetate;
• (B) mixing the titanium tetraacetate while adding thereto an aqueous solution containing “M”;
• (C) spinning the solution of step (B) onto a suitable substrate at 500 rpm and then at about 1,000 to about 4,000 rpm until a uniform distribution is obtained;
• (D) drying the coated substrate of step (C) by heating at about 150° C. to about 200° C.;
• (E) heating the product of step (D) at a temperature between about 360° C. to about 400° C. to remove volatile organic material therefrom;
• (F) annealing the product of step (E) at about 500° C. to about 850° C. until crystallization is complete
• wherein the barium diacetate, acetic acid, alcohol and solution of “M” have a purity of at least 95% and further wherein steps (A) through (F) are preferably conducted in a dry nitrogen-rich atmosphere.

A BaaTibOc thin film composite wherein a and b are independently about 0.75 to about 1.25 and c is about 2.5 to about 5.0 produced by the process which comprises:

• (A) reacting a glycol with barium oxide under agitation;
• (B) diluting the reaction mixture of stop (A) with an alcohol;
• (C) adding titanium isopropoxide to the reaction product of step (3) with agitation;
• (D) depositing the mixture of step (C) onto a substrate;
• (E) drying the coating of step (D) at a temperature of from about 150° C. to about 200° C.;
• (F) annealing the product of step (E) at a temperature of from about 600° C. to about 800° C. until crystallization
• wherein the glycol, barium oxide, alcohol and titanium isopropoxide have a purity of at least 95% and further wherein steps (A) through (F) are conducted in a dry nitrogen-rich atmosphere.

A MaBabTicOd thin film composite wherein M is Au, Cu, Ni3Al, Ru or InSn, a and b are independently about 0.75 to about 1.25, c is about 2.5 to about 5.0 and d is about 0.01 to about 0.25 produced by the process which comprises:

• (A) reacting a glycol with barium oxide under agitation;
• (B) diluting the reaction mixture of step (A) with an alcohol;
• (C) adding titanium isopropoxide to the reaction product of step (B) with agitation;
• (D) adding an aqueous solution containing “M” in an alcohol to the product of step (C);
• (E) depositing the mixture of step (D) onto a substrate;
• (F) drying the coating of step (E) at a temperature of from about 150° C. to about 200° C.;
• (G) annealing the product of step (F) at a temperature of from about 600° C. to about 800° C. until crystallization
• wherein the glycol, barium oxide, alcohol, titanium isopropoxide and solution containing “M” have a purity of at least 95% and further wherein steps (A) through (G) are conducted in a dry nitrogen-rich atmosphere.